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ABATCHEV MIRZAFER
US4 patents
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US8479384B2Jul 9, 2013
Methods for integrated circuit fabrication with protective coating for planarization
ABATCHEV MIRZAFER6 citations83
US8207614B2Jun 26, 2012
Methods for forming arrays of small, closely spaced features
ABATCHEV MIRZAFER10 citations83
US9099402B2Aug 4, 2015
Integrated circuit structure having arrays of small, closely spaced features
ABATCHEV MIRZAFER4 citations72
US9267605B2Feb 23, 2016
Pressure control valve assembly of plasma processing chamber and rapid alternating process
ABATCHEV MIRZAFER2 citations61