Assignee
ABE TATSUO
JP·3 granted patents·2 citations·filing 2002–2012
Top patents by PatentIndex Score
3 records- 0162US8083856B2Ultrasonic cleaning apparatus and ultrasonic cleaning methodABE TATSUO·Filed 2009·Granted Dec 27, 2011·2 cites·6 claims
- 0237US9082610B2Method for cleaning semiconductor waferABE TATSUO·Filed 2012·Granted Jul 14, 2015·0 cites·6 claims
- 0332US8303722B2Water and method for storing silicon waferABE TATSUO·Filed 2002·Granted Nov 6, 2012·0 cites·1 claims
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