Assignee
ABURATANI YUKINORI
JP·5 granted patents·313 citations·filing 2007–2012
Top patents by PatentIndex Score
5 records- 0197US8128333B2Substrate processing apparatus and manufacturing method for semiconductor devicesABURATANI YUKINORI·Filed 2007·Granted Mar 6, 2012·290 cites·8 claims
- 0286US8277161B2Substrate processing apparatus and manufacturing method of a semiconductor deviceABURATANI YUKINORI·Filed 2008·Granted Oct 2, 2012·12 cites·22 claims
- 0382US8814488B2Substrate processing apparatus and semiconductor device manufacturing methodABURATANI YUKINORI·Filed 2008·Granted Aug 26, 2014·9 cites·19 claims
- 0468US8876453B2Substrate processing apparatus and method of manufacturing semiconductor deviceABURATANI YUKINORI·Filed 2011·Granted Nov 4, 2014·2 cites·6 claims
- 0540US9082797B2Substrate processing apparatus and method of manufacturing semiconductor deviceABURATANI YUKINORI·Filed 2012·Granted Jul 14, 2015·0 cites·12 claims
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