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ACADEMY OPTO ELECTRONICS CAS
CN3 patents
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US9252557B2Feb 2, 2016
Single cavity dual-electrode discharge cavity and excimer laser
ACADEMY OPTO ELECTRONICS CAS0 citations43
US9325143B2Apr 26, 2016
Excimer laser composite cavity
ACADEMY OPTO ELECTRONICS CAS0 citations37
US9350135B2May 24, 2016
Flow guide device for dual-electrode discharge cavity, dual electrode discharge cavity utilize the same and excimer laser
ACADEMY OPTO ELECTRONICS CAS0 citations30