Assignee
ADE CORP
US46 patents
Top patents by PatentIndex Score
US5642298AJun 24, 1997
Wafer testing and self-calibration system
ADE CORP155 citations96
US5511005AApr 23, 1996
Wafer handling and processing system
ADE CORP249 citations96
US5102280AApr 7, 1992
Robot prealigner
ADE CORP109 citations95
US4897015AJan 30, 1990
Rotary to linear motion robot arm
ADE CORP136 citations95
US4750141AJun 7, 1988
Method and apparatus for separating fixture-induced error from measured object characteristics and for compensating the measured object characteristic with the error, and a bow/warp station implementing same
ADE CORP105 citations95
US5456561AOct 10, 1995
Robot prealigner
ADE CORP62 citations94
US5332352AJul 26, 1994
Robot prealigner
ADE CORP40 citations94
US4457664AJul 3, 1984
Wafer alignment station
ADE CORP133 citations94
US6538733B2Mar 25, 2003
Ring chuck to hold 200 and 300 mm wafer
ADE CORP18 citations92
US4958129ASep 18, 1990
Prealigner probe
ADE CORP46 citations92
US4860229AAug 22, 1989
Wafer flatness station
ADE CORP42 citations92
US4849916AJul 18, 1989
Improved spatial resolution measurement system and method
ADE CORP24 citations92
US4158171AJun 12, 1979
Wafer edge detection system
ADE CORP33 citations92
US3990005ANov 2, 1976
Capacitive thickness gauging for ungrounded elements
ADE CORP46 citations92
US3986109AOct 12, 1976
Self-calibrating dimension gauge
ADE CORP45 citations92
US6560555B1May 6, 2003
Method for facilitating the field replacement of sensors
ADE CORP20 citations91
US5708368AJan 13, 1998
Method and apparatus for emulation of a linear variable differential transducer by a capacitive gaging system
ADE CORP30 citations91
US4918376AApr 17, 1990
A.C. capacitive gauging system
ADE CORP41 citations91
US5557267ASep 17, 1996
Apparatus and methods for measurement system calibration
ADE CORP23 citations90
US6486946B1Nov 26, 2002
Method for discriminating between holes in and particles on a film covering a substrate
ADE CORP26 citations89
US6400162B1Jun 4, 2002
Capacitive displacement sensor for measuring thin targets
ADE CORP41 citations89
US6491330B1Dec 10, 2002
Edge gripping end effector wafer handling apparatus
ADE CORP34 citations86
US7280200B2Oct 9, 2007
Detection of a wafer edge using collimated light
ADE CORP25 citations85
US6621581B1Sep 16, 2003
Method and apparatus for mapping surface topography of a substrate
ADE CORP21 citations81
US4217542AAug 12, 1980
Self inverting gauging system
ADE CORP26 citations81
US4931962AJun 5, 1990
Fixture and nonrepeatable error compensation system
ADE CORP29 citations80
US6760100B2Jul 6, 2004
Method and apparatus for classifying defects occurring at or near a surface of a smooth substrate
ADE CORP14 citations77
US4692695ASep 8, 1987
Conductivity-type sensor
ADE CORP15 citations74
US4910453AMar 20, 1990
Multi-probe grouping system with nonlinear error correction
ADE CORP14 citations73
US4353029AOct 5, 1982
Self inverting gauging system
ADE CORP9 citations73
US7114399B2Oct 3, 2006
Shaped non-contact capacitive displacement sensors for measuring shaped targets
ADE CORP8 citations72
US5786698AJul 28, 1998
Transducer Bootstrapping apparatus
ADE CORP8 citations72
US6594002B2Jul 15, 2003
Wafer shape accuracy using symmetric and asymmetric instrument error signatures
ADE CORP8 citations71
US6025787AFeb 15, 2000
Apparatus and methods for measurement system calibration
ADE CORP14 citations71
US4646009AFeb 24, 1987
Contacts for conductivity-type sensors
ADE CORP15 citations71
US6501269B1Dec 31, 2002
Vector kerr magnetometry
ADE CORP12 citations68
US7302360B2Nov 27, 2007
Defect size projection
ADE CORP2 citations63
US7136519B2Nov 14, 2006
Specimen topography reconstruction
ADE CORP4 citations62
US6954269B2Oct 11, 2005
Ring chuck to hold 200 and 300 mm wafer
ADE CORP4 citations62
US6556941B2Apr 29, 2003
Separation of periodic and non-periodic signal components
ADE CORP3 citations62
US4228392AOct 14, 1980
Second order correction in linearized proximity probe
ADE CORP6 citations62
US6476621B1Nov 5, 2002
Self-bootstrapping transducer interface
ADE CORP4 citations61
US6181142B1Jan 30, 2001
Nonlinear current mirror for loop-gain control
ADE CORP4 citations61
US6260899B1Jul 17, 2001
Centrifugal gripper mechanism for dynamic force compensation
ADE CORP4 citations54
US7175214B2Feb 13, 2007
Wafer gripping fingers to minimize distortion
ADE CORP0 citations44
US7184928B2Feb 27, 2007
Extended defect sizing
ADE CORP0 citations39