Assignee
ADEL MICHAEL
IL5 patents
Top patents by PatentIndex Score
US9116442B2Aug 25, 2015
Feedforward/feedback litho process control of stress and overlay
ADEL MICHAEL18 citations92
US8214771B2Jul 3, 2012
Scatterometry metrology target design optimization
ADEL MICHAEL32 citations92
US8111376B2Feb 7, 2012
Feedforward/feedback litho process control of stress and overlay
ADEL MICHAEL20 citations92
US9151712B1Oct 6, 2015
Rule checking for metrology and inspection
ADEL MICHAEL16 citations84
US8930156B2Jan 6, 2015
Metrology through use of feed forward feed sideways and measurement cell re-use
ADEL MICHAEL5 citations73