Assignee
ADIXEN VACUUM PRODUCTS
FR·5 granted patents·1 pending application·9 citations·filing 2012–2014
Top patents by PatentIndex Score
6 records- 0182US9558969B2Method and device for pumping of a process chamberADIXEN VACUUM PRODUCTS·Filed 2013·Granted Jan 31, 2017·7 cites·13 claims
- 0257US9810617B2Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressureADIXEN VACUUM PRODUCTS·Filed 2013·Granted Nov 7, 2017·1 cites·16 claims
- 0350US9841345B2Detection method and facility for checking sealed products for leaksADIXEN VACUUM PRODUCTS·Filed 2013·Granted Dec 12, 2017·1 cites·12 claims
- 0444US9599110B2Gas pumping and treatment deviceADIXEN VACUUM PRODUCTS·Filed 2012·Granted Mar 21, 2017·0 cites·16 claims
- 0534US9816974B2Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressureADIXEN VACUUM PRODUCTS·Filed 2013·Granted Nov 14, 2017·0 cites·12 claims
- 0633US2014205482A1Multi-stage vacuum pump of the dry pump typeADIXEN VACUUM PRODUCTS·Filed 2014·Application pending·0 cites
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