Assignee
ADVANCED ION BEAM TECH INC
US·36 granted patents·11 pending applications·77 citations·filing 2008–2024
Top patents by PatentIndex Score
47 records- 0195US9450078B1Forming punch-through stopper regions in finFET devicesADVANCED ION BEAM TECH INC·Filed 2015·Granted Sep 20, 2016·20 cites·28 claims
- 0290US8673753B1Multi-energy ion implantationADVANCED ION BEAM TECH INC·Filed 2012·Granted Mar 18, 2014·8 cites·20 claims
- 0389US9209278B2Replacement source/drain finFET fabricationADVANCED ION BEAM TECH INC·Filed 2014·Granted Dec 8, 2015·8 cites·20 claims
- 0488US9281162B2Single bend energy filter for controlling deflection of charged particle beamADVANCED ION BEAM TECH INC·Filed 2014·Granted Mar 8, 2016·8 cites·16 claims
- 0584US9852887B2Ion source of an ion implanterADVANCED ION BEAM TECH INC·Filed 2013·Granted Dec 26, 2017·6 cites·68 claims
- 0678US9006065B2Plasma doping a non-planar semiconductor deviceADVANCED ION BEAM TECH INC·Filed 2012·Granted Apr 14, 2015·4 cites·23 claims
- 0777US9340870B2Magnetic field fluctuation for beam smoothingADVANCED ION BEAM TECH INC·Filed 2013·Granted May 17, 2016·3 cites·23 claims
- 0877US9057129B2Implant method and implanter by using a variable apertureADVANCED ION BEAM TECH INC·Filed 2014·Granted Jun 16, 2015·3 cites·19 claims
- 0976US9697988B2Ion implantation system and processADVANCED ION BEAM TECH INC·Filed 2015·Granted Jul 4, 2017·2 cites·40 claims
- 1074US8895944B2Scan head and scan arm using the sameADVANCED ION BEAM TECH INC·Filed 2013·Granted Nov 25, 2014·3 cites·31 claims
- 1173US10984524B2Calibration system with at least one camera and method thereofADVANCED ION BEAM TECH INC·Filed 2018·Granted Apr 20, 2021·2 cites·29 claims
- 1273US2025062097A1Ribbon beam angle adjustment in an ion implantation systemADVANCED ION BEAM TECH INC·Filed 2024·Application pending·0 cites
- 1370US8040124B2Method and apparatus for monitoring leakage current of a faraday cupADVANCED ION BEAM TECH INC·Filed 2009·Granted Oct 18, 2011·3 cites·20 claims
- 1469US11062926B2Wafer charges monitoringADVANCED ION BEAM TECH INC·Filed 2019·Granted Jul 13, 2021·1 cites·14 claims
- 1569US9653253B2Plasma-based material modification using a plasma source with magnetic confinementADVANCED ION BEAM TECH INC·Filed 2014·Granted May 16, 2017·2 cites·32 claims
- 1665US10804821B2Apparatus and method for monitoring the relative relationship between the wafer and the chuckADVANCED ION BEAM TECH INC·Filed 2017·Granted Oct 13, 2020·1 cites·6 claims
- 1762US12170182B2Ribbon beam angle adjustment in an ion implantation systemADVANCED ION BEAM TECH INC·Filed 2021·Granted Dec 17, 2024·0 cites·35 claims
- 1862US9269528B2Medium current ribbon beam for ion implantationADVANCED ION BEAM TECH INC·Filed 2014·Granted Feb 23, 2016·1 cites·14 claims
- 1962US7851767B2Beam control assembly for ribbon beam of ions for ion implantationADVANCED ION BEAM TECH INC·Filed 2008·Granted Dec 14, 2010·0 cites·19 claims
- 2061US8993979B2Beam control assembly for ribbon beam of ions for ion implantationADVANCED ION BEAM TECH INC·Filed 2014·Granted Mar 31, 2015·0 cites·19 claims
- 2161US8907301B1Gas mixture method for generating ion beamADVANCED ION BEAM TECH INC·Filed 2013·Granted Dec 9, 2014·1 cites·14 claims
- 2260US9431247B2Method for ion implantationADVANCED ION BEAM TECH INC·Filed 2015·Granted Aug 30, 2016·1 cites·14 claims
- 2359US8680480B2Beam control assembly for ribbon beam of ions for ion implantationADVANCED ION BEAM TECH INC·Filed 2013·Granted Mar 25, 2014·0 cites·16 claims
- 2458US11349414B2Apparatus and method for monitoring the relative relationship between the wafer and the chuckADVANCED ION BEAM TECH INC·Filed 2020·Granted May 31, 2022·0 cites·13 claims
- 2554US9117629B2Multi-energy ion implantationADVANCED ION BEAM TECH INC·Filed 2014·Granted Aug 25, 2015·0 cites·20 claims
- 2653US10361059B2Magnetic field fluctuation for beam smoothingADVANCED ION BEAM TECH INC·Filed 2016·Granted Jul 23, 2019·0 cites·18 claims
- 2751US2011049383A1Ion implanter and ion implant method thereofADVANCED ION BEAM TECH INC·Filed 2009·Application pending·0 cites
- 2850US11942343B2Wafer temperature measurement in an ion implantation systemADVANCED ION BEAM TECH INC·Filed 2021·Granted Mar 26, 2024·0 cites·28 claims
- 2950US9368326B2Scan head and scan arm using the sameADVANCED ION BEAM TECH INC·Filed 2013·Granted Jun 14, 2016·0 cites·9 claims
- 3049US10475678B2Wafer charges monitoringADVANCED ION BEAM TECH INC·Filed 2018·Granted Nov 12, 2019·0 cites·16 claims
- 3148US9824850B2Deceleration apparatus for ribbon and spot beamsADVANCED ION BEAM TECH INC·Filed 2015·Granted Nov 21, 2017·0 cites·19 claims
- 3247US11430589B2Hybrid magnet structureADVANCED ION BEAM TECH INC·Filed 2021·Granted Aug 30, 2022·0 cites·9 claims
- 3346US2016111245A1Electrode assembly having pierce electrodes for controlling space charge effectsADVANCED ION BEAM TECH INC·Filed 2014·Application pending·0 cites
- 3445US8987691B2Ion implanter and ion implant method thereofADVANCED ION BEAM TECH INC·Filed 2013·Granted Mar 24, 2015·0 cites·27 claims
- 3544US9748072B2Lower dose rate ion implantation using a wider ion beamADVANCED ION BEAM TECH INC·Filed 2014·Granted Aug 29, 2017·0 cites·37 claims
- 3644US2019301661A1Vacuum jacketed tubeADVANCED ION BEAM TECH INC·Filed 2019·Application pending·0 cites
- 3743US11600464B2Apparatus and method for reduction of particle contamination by bias voltageADVANCED ION BEAM TECH INC·Filed 2020·Granted Mar 7, 2023·0 cites·51 claims
- 3843US2013299722A1Ion implantation method and ion implanterADVANCED ION BEAM TECH INC·Filed 2013·Application pending·0 cites
- 3942US9147550B2Gas mixture method and apparatus for generating ion beamADVANCED ION BEAM TECH INC·Filed 2012·Granted Sep 29, 2015·0 cites·26 claims
- 4040US2018315605A1Method for Ion ImplantationADVANCED ION BEAM TECH INC·Filed 2018·Application pending·0 cites
- 4139US8039374B2Method for low temperature ion implantationADVANCED ION BEAM TECH INC·Filed 2010·Granted Oct 18, 2011·0 cites·20 claims
- 4236US10699876B2Method of cleaning electrostatic chuckADVANCED ION BEAM TECH INC·Filed 2016·Granted Jun 30, 2020·0 cites·20 claims
- 4335US2017069467A1Plasma-based processing system and operation method thereofADVANCED ION BEAM TECH INC·Filed 2016·Application pending·0 cites
- 4434US2016217970A1Ion implanter and method for ion implantationADVANCED ION BEAM TECH INC·Filed 2015·Application pending·0 cites
- 4533US2016076142A1Deposition Apparatus and Deposition Method Using the SameADVANCED ION BEAM TECH INC·Filed 2015·Application pending·0 cites
- 4633US2016233047A1Plasma-based material modification with neutral beamADVANCED ION BEAM TECH INC·Filed 2016·Application pending·0 cites
- 4729US2016203950A1Method and ion implanter for low temperature implantationADVANCED ION BEAM TECH INC·Filed 2015·Application pending·0 cites
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