Assignee
ADVANCED MASK INSPECTION TECH
JP·24 granted patents·12 pending applications·133 citations·filing 2005–2009
Top patents by PatentIndex Score
36 records- 0187US7487491B2Pattern inspection system using image correction scheme with object-sensitive automatic mode switchabilityADVANCED MASK INSPECTION TECH·Filed 2006·Granted Feb 3, 2009·18 cites·12 claims
- 0284US7655904B2Target workpiece inspection apparatus, image alignment method, and computer-readable recording medium with program recorded thereonADVANCED MASK INSPECTION TECH·Filed 2007·Granted Feb 2, 2010·9 cites·19 claims
- 0383US7630535B2Die-to-die photomask defect detection using region data to modify inspection thresholdsADVANCED MASK INSPECTION TECH·Filed 2006·Granted Dec 8, 2009·13 cites·7 claims
- 0482US7787686B2Image density-adapted automatic mode switchable pattern correction scheme for workpiece inspectionADVANCED MASK INSPECTION TECH·Filed 2009·Granted Aug 31, 2010·5 cites·3 claims
- 0581US7656516B2Pattern inspection apparatusADVANCED MASK INSPECTION TECH·Filed 2007·Granted Feb 2, 2010·5 cites·2 claims
- 0680US7796803B2Image correction method and apparatus for use in pattern inspection systemADVANCED MASK INSPECTION TECH·Filed 2006·Granted Sep 14, 2010·10 cites·5 claims
- 0777US7781749B2Beam irradiation apparatus with deep ultraviolet light emission device for lithographic pattern inspection systemADVANCED MASK INSPECTION TECH·Filed 2008·Granted Aug 24, 2010·4 cites·20 claims
- 0877US7664308B2Photomask inspection apparatus comparing optical proximity correction patterns to minimum and maximum limitsADVANCED MASK INSPECTION TECH·Filed 2005·Granted Feb 16, 2010·9 cites·13 claims
- 0977US7643668B2Workpiece inspection apparatus, workpiece inspection method and computer-readable recording medium storing programADVANCED MASK INSPECTION TECH·Filed 2005·Granted Jan 5, 2010·5 cites·8 claims
- 1075US7809181B2Pattern inspection apparatus, image alignment method, displacement amount estimation method, and computer-readable recording medium with program recorded thereonADVANCED MASK INSPECTION TECH·Filed 2007·Granted Oct 5, 2010·7 cites·19 claims
- 1174US7565032B2Image density-adapted automatic mode switchable pattern correction scheme for workpiece inspectionADVANCED MASK INSPECTION TECH·Filed 2006·Granted Jul 21, 2009·6 cites·9 claims
- 1274US7539222B2Method of operating laser light sourceADVANCED MASK INSPECTION TECH·Filed 2006·Granted May 26, 2009·4 cites·5 claims
- 1373US7639863B2Die-to-database photomask defect detection using region data to modify inspection thresholdsADVANCED MASK INSPECTION TECH·Filed 2005·Granted Dec 29, 2009·10 cites·10 claims
- 1471US7495756B2Pattern inspection apparatusADVANCED MASK INSPECTION TECH·Filed 2005·Granted Feb 24, 2009·2 cites·16 claims
- 1571US7275006B2Workpiece inspection apparatus assisting device, workpiece inspection method and computer-readable recording media storing program thereforADVANCED MASK INSPECTION TECH·Filed 2005·Granted Sep 25, 2007·4 cites·4 claims
- 1667US7756318B2Pattern inspection apparatus and method with local critical dimension error detectabilityADVANCED MASK INSPECTION TECH·Filed 2006·Granted Jul 13, 2010·4 cites·5 claims
- 1766US7577288B2Sample inspection apparatus, image alignment method, and program-recorded readable recording mediumADVANCED MASK INSPECTION TECH·Filed 2005·Granted Aug 18, 2009·6 cites·9 claims
- 1866US7495779B2Level detection apparatusADVANCED MASK INSPECTION TECH·Filed 2008·Granted Feb 24, 2009·1 cites·10 claims
- 1962US7764825B2Pattern inspection apparatus and method with enhanced test image correctability using frequency division schemeADVANCED MASK INSPECTION TECH·Filed 2006·Granted Jul 27, 2010·4 cites·4 claims
- 2062US7388660B2Light amount measurement device and light amount measurement methodADVANCED MASK INSPECTION TECH·Filed 2006·Granted Jun 17, 2008·3 cites·10 claims
- 2159US7706623B2Image correcting methodADVANCED MASK INSPECTION TECH·Filed 2006·Granted Apr 27, 2010·2 cites·8 claims
- 2254US7627164B2Pattern inspection method and apparatus with high-accuracy pattern image correction capabilityADVANCED MASK INSPECTION TECH·Filed 2006·Granted Dec 1, 2009·2 cites·8 claims
- 2349US2008204737A1Mask pattern inspection apparatus with koehler illumination system using light source of high spatial coherencyADVANCED MASK INSPECTION TECH·Filed 2008·Application pending·0 cites
- 2444US7627165B2Pattern inspection method and apparatus using linear predictive model-based image correction techniqueADVANCED MASK INSPECTION TECH·Filed 2006·Granted Dec 1, 2009·0 cites·11 claims
- 2543US2010073684A1Xy stage apparatusADVANCED MASK INSPECTION TECH·Filed 2009·Application pending·0 cites
- 2642US7539350B2Image correction methodADVANCED MASK INSPECTION TECH·Filed 2006·Granted May 26, 2009·0 cites·7 claims
- 2742US2007064998A1Pattern inspection apparatus, pattern inspection method, and inspection sampleADVANCED MASK INSPECTION TECH·Filed 2006·Application pending·0 cites
- 2842US2007064750A1Deep ultraviolet laser apparatusADVANCED MASK INSPECTION TECH·Filed 2006·Application pending·0 cites
- 2941US2006222233A1Pattern defect inspection method and apparatus using image correction techniqueADVANCED MASK INSPECTION TECH·Filed 2006·Application pending·0 cites
- 3041US2007064749A1Deep ultraviolet laser apparatusADVANCED MASK INSPECTION TECH·Filed 2006·Application pending·0 cites
- 3139US2007146707A1Pattern inspection apparatus and method along with workpiece tested thereby and management method of workpiece under testingADVANCED MASK INSPECTION TECH·Filed 2006·Application pending·0 cites
- 3238US2007165938A1Pattern inspection apparatus and method and workpiece tested therebyADVANCED MASK INSPECTION TECH·Filed 2006·Application pending·0 cites
- 3337US2008291528A1Wavelength converter system, crystal storage apparatus, and crystal replacement method of wavelength converterADVANCED MASK INSPECTION TECH·Filed 2008·Application pending·0 cites
- 3431US2007053583A1Image correcting apparatus, pattern inspection apparatus, and image correcting method, and reticleADVANCED MASK INSPECTION TECH·Filed 2005·Application pending·0 cites
- 3531US2007052960A1Reference image forming apparatus, pattern inspection apparatus, and reference image forming method, and reticleADVANCED MASK INSPECTION TECH·Filed 2005·Application pending·0 cites
- 3630US2007053578A1Pattern inspection apparatus and method and reticle for use thereinADVANCED MASK INSPECTION TECH·Filed 2005·Application pending·0 cites
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