Assignee

ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA

CN·32 granted patents·15 pending applications·10 citations·filing 2013–2024

Technology mixH01J39 H10P31 H01L23 C23C13 H05H7 H05B5

Top patents by PatentIndex Score

47 records

0193US11545342B2Plasma processor and processing methodADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted Jan 3, 2023·4 cites·18 claims
0288US9945031B2Gas shower device, chemical vapor deposition device and methodADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2015·Granted Apr 17, 2018·3 cites·20 claims
0377US2025011917A1Method and apparatus for forming a plasma resistant coating, component, and plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2024·Application pending·0 cites
0473US2024071724A1Method and device for matching impedance of pulse radio frequency plasmaADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2023·Application pending·0 cites
0569US12094695B2Multi-zone temperature control plasma reactorADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Sep 17, 2024·2 cites·8 claims
0669US2019338408A1Coating for performance enhancement of semiconductor apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Application pending·0 cites
0766US11626314B2Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is locatedADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Apr 11, 2023·1 cites·10 claims
0864US12123089B2Method and apparatus for forming a plasma resistant coating, component, and plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted Oct 22, 2024·0 cites·7 claims
0963US2025129511A1Semiconductor processing chamber, semiconductor processing equipment and vapor epitaxy equipmentADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2023·Application pending·0 cites
1062US2025027203A1Chemical vapor deposition equipment and method thereforADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2022·Application pending·0 cites
1161US12309891B2Control method for multi-zone active-matrix temperature control in plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2021·Granted May 20, 2025·0 cites·16 claims
1261US2026078493A1Temperature control component and cvd reaction apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2023·Application pending·0 cites
1360US2024392437A1Vapor deposition apparatus and substrate treatment methodADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2024·Application pending·0 cites
1457US2020185196A1Method and device for matching impedance of pulse radio frequency plasmaADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Application pending·0 cites
1555US12431337B2Plasma processing device and retractable sealing part thereofADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2022·Granted Sep 30, 2025·0 cites·19 claims
1655US12261012B2Plasma treatment apparatus, lower electrode assembly and forming method thereofADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2022·Granted Mar 25, 2025·0 cites·8 claims
1755US11676803B2Liner assembly for vacuum treatment apparatus, and vacuum treatment apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted Jun 13, 2023·0 cites·24 claims
1855US10187965B2Plasma confinement apparatus, and method for confining a plasmaADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2013·Granted Jan 22, 2019·0 cites·18 claims
1955US2025027201A1Substrate supporting device and substrate processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2022·Application pending·0 cites
2054US2025037971A1Plasma processing deviceADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2022·Application pending·0 cites
2153US11371141B2Plasma process apparatus with low particle contamination and method of operating the sameADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2018·Granted Jun 28, 2022·0 cites·11 claims
2253US2025029814A1Flexible mounting connection structure and corresponding plasma processorADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2022·Application pending·0 cites
2351US11363680B2Plasma reactor and heating apparatus thereforADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Jun 14, 2022·0 cites·10 claims
2451US10685811B2Switchable matching network and an inductively coupled plasma processing apparatus having such networkADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Jun 16, 2020·0 cites·21 claims
2551US2025316456A1Plasma treatment device, shower head and manufacturing method thereforADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2023·Application pending·0 cites
2650US12094693B2Bottom electrode assembly, plasma processing apparatus, and method of replacing focus ringADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2021·Granted Sep 17, 2024·0 cites·20 claims
2750US12087548B2Plasma reactorADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2021·Granted Sep 10, 2024·0 cites·14 claims
2850US12046458B2Multi-zone heating apparatus, bottom electrode assembly, plasma processing apparatus, and temperature adjusting methodADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2021·Granted Jul 23, 2024·0 cites·24 claims
2950US11682541B2Radio frequency power supply system, plasma processor, and frequency-tuning matchingADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted Jun 20, 2023·0 cites·28 claims
3050US2025357207A1Method for depositing tungsten in high-aspect-ratio structure, and semiconductor substrate thereofADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2023·Application pending·0 cites
3148US12573595B2Plasma processing apparatus and method of adjusting the sameADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2021·Granted Mar 10, 2026·0 cites·16 claims
3248US12080570B2Semiconductor processing systemADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2021·Granted Sep 3, 2024·0 cites·20 claims
3347US11670515B2Capacitively coupled plasma etching apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Jun 6, 2023·0 cites·9 claims
3446US12494350B2Lower electrode assembly and plasma processing deviceADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2022·Granted Dec 9, 2025·0 cites·17 claims
3546US2025019831A1Wafer transfer apparatus, vapor deposition system and method of operating the vapor deposition systemADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2022·Application pending·0 cites
3645US11621149B2Corrosion-resistant gas delivery assembly, and plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted Apr 4, 2023·0 cites·15 claims
3745US11515168B2Capacitively coupled plasma etching apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Nov 29, 2022·0 cites·9 claims
3845US11373843B2Capacitively coupled plasma etching apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Jun 28, 2022·0 cites·11 claims
3944US12341037B2Temperature control apparatus for semiconductor processing equipment, and temperature control method for the sameADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Jun 24, 2025·0 cites·11 claims
4044US11309165B2Gas showerhead, manufacturing method, and plasma apparatus including the gas showerheadADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted Apr 19, 2022·0 cites·30 claims
4144US11189496B2Plasma reactor for ultra-high aspect ratio etching and etching method thereofADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted Nov 30, 2021·0 cites·13 claims
4244US2021118716A1Electrostatic chuck, method of manufacturing electrostatic chuck, and plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Application pending·0 cites
4341US11875970B2Radio frequency electrode assembly for plasma processing apparatus, and plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Jan 16, 2024·0 cites·18 claims
4441US11830747B2Plasma reactor having a function of tuning low frequency RF power distributionADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2018·Granted Nov 28, 2023·0 cites·11 claims
4541US11348763B2Corrosion-resistant structure for a gas delivery system in a plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted May 31, 2022·0 cites·9 claims
4633US11387084B2Uniform pumping dual-station vacuum processorADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2017·Granted Jul 12, 2022·0 cites·8 claims
4732US11538705B2Plasma processing system and operating method of the sameADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2018·Granted Dec 27, 2022·0 cites·12 claims

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