Individual holder
AHN SANG H
US·2 granted patents·1 pending application·1 citations·filing 2005–2006
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
3 records- 0157US8211626B2Maintenance of photoresist activity on the surface of dielectric arcs for 90 nm feature sizesAHN SANG H·Filed 2006·Granted Jul 3, 2012·1 cites·10 claims
- 0247US8088563B2Reduction in photoresist footing undercut during development of feature sizes of 120NM or lessAHN SANG H·Filed 2006·Granted Jan 3, 2012·0 cites·27 claims
- 0339US2007134435A1Method to improve the ashing/wet etch damage resistance and integration stability of low dielectric constant filmsAHN SANG H·Filed 2005·Application pending·0 cites
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