Assignee

AIR LIQUIDE ADVANCED MAT INC

US·2 granted patents·340 citations·filing 2016–2017

Technology mixC01B1 C07F1 C23C1 H01L1 H10P1

Top patents by PatentIndex Score

2 records

0197US10192734B2Short inorganic trisilylamine-based polysilazanes for thin film depositionAIR LIQUIDE ADVANCED MAT INC·Filed 2017·Granted Jan 29, 2019·337 cites·11 claims
0286US10106425B2Synthesis methods for halosilanesAIR LIQUIDE ADVANCED MAT INC·Filed 2016·Granted Oct 23, 2018·3 cites·13 claims

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