Assignee
AIR LIQUIDE ELECTRONICS US LP
US·18 granted patents·8 pending applications·133 citations·filing 2004–2016
Top patents by PatentIndex Score
26 records- 0191US7344297B2Method and apparatus for asynchronous blending and supply of chemical solutionsAIR LIQUIDE ELECTRONICS US LP·Filed 2005·Granted Mar 18, 2008·32 cites·46 claims
- 0288US7498295B2Alkaline chemistry for post-CMP cleaning comprising tetra alkyl ammonium hydroxideAIR LIQUIDE ELECTRONICS US LP·Filed 2007·Granted Mar 3, 2009·14 cites·17 claims
- 0387US7980753B2Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation systemAIR LIQUIDE ELECTRONICS US LP·Filed 2006·Granted Jul 19, 2011·12 cites·10 claims
- 0487US7906175B2Methods for forming a ruthenium-based film on a substrateAIR LIQUIDE ELECTRONICS US LP·Filed 2008·Granted Mar 15, 2011·6 cites·19 claims
- 0584US10371566B1Load cell failure detection and delayed repairAIR LIQUIDE ELECTRONICS US LP·Filed 2016·Granted Aug 6, 2019·7 cites·9 claims
- 0684US7871249B2Systems and methods for managing fluids using a liquid ring pumpAIR LIQUIDE ELECTRONICS US LP·Filed 2006·Granted Jan 18, 2011·12 cites·39 claims
- 0782US8859797B1Synthesis methods for carbosilanesAIR LIQUIDE ELECTRONICS US LP·Filed 2013·Granted Oct 14, 2014·3 cites·5 claims
- 0881US7810516B2Control of fluid conditions in bulk fluid distribution systemsAIR LIQUIDE ELECTRONICS US LP·Filed 2006·Granted Oct 12, 2010·18 cites·21 claims
- 0978US7770448B2Chemical storage device with integrated load cellAIR LIQUIDE ELECTRONICS US LP·Filed 2006·Granted Aug 10, 2010·11 cites·27 claims
- 1075US8702297B2Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation systemAIR LIQUIDE ELECTRONICS US LP·Filed 2012·Granted Apr 22, 2014·2 cites·13 claims
- 1175US7743783B2Method and apparatus for recycling process fluidsAIR LIQUIDE ELECTRONICS US LP·Filed 2007·Granted Jun 29, 2010·5 cites·2 claims
- 1275US6943878B2Methods and systems for controlling the concentration of a component in a composition with absorption spectroscopyAIR LIQUIDE ELECTRONICS US LP·Filed 2004·Granted Sep 13, 2005·11 cites·7 claims
- 1357US2016296902A1Deterministic feedback blenderAIR LIQUIDE ELECTRONICS US LP·Filed 2016·Application pending·0 cites
- 1456US2009020140A1Non-flammable solvents for semiconductor applicationsAIR LIQUIDE ELECTRONICS US LP·Filed 2008·Application pending·0 cites
- 1556US2010116738A1Process Of Purifying Ruthenium PrecursorsAIR LIQUIDE ELECTRONICS US LP·Filed 2009·Application pending·0 cites
- 1655US8361199B2Purification of H2SeAIR LIQUIDE ELECTRONICS US LP·Filed 2011·Granted Jan 29, 2013·0 cites·13 claims
- 1746US7287980B2Ton unit heating saddleAIR LIQUIDE ELECTRONICS US LP·Filed 2006·Granted Oct 30, 2007·0 cites·19 claims
- 1845US9517873B1Clean storage packaging article and method for making and usingAIR LIQUIDE ELECTRONICS US LP·Filed 2012·Granted Dec 13, 2016·0 cites·19 claims
- 1944US10370170B1Clean storage packaging article and method for making and usingAIR LIQUIDE ELECTRONICS US LP·Filed 2016·Granted Aug 6, 2019·0 cites·16 claims
- 2042US2008145978A1Deposition of silicon germanium nitrogen precursors for strain engineeringAIR LIQUIDE ELECTRONICS US LP·Filed 2007·Application pending·0 cites
- 2140US2009090164A1Method for volumetrically calibrating a liquid flow controller while maintaining the liquid in a closed systemAIR LIQUIDE ELECTRONICS US LP·Filed 2007·Application pending·0 cites
- 2238US9372603B2Data sampling method for determining salient values in a large data streamAIR LIQUIDE ELECTRONICS US LP·Filed 2013·Granted Jun 21, 2016·0 cites·19 claims
- 2337US2015325097A1Smart canisterAIR LIQUIDE ELECTRONICS US LP·Filed 2015·Application pending·0 cites
- 2437US2011117696A1CdTe SURFACE TREATMENT FOR STABLE BACK CONTACTSAIR LIQUIDE ELECTRONICS US LP·Filed 2010·Application pending·0 cites
- 2536US2010189898A1MANUFACTURING OF ADDUCT FREE ALKALINE-EARTH METAL Cp COMPLEXESAIR LIQUIDE ELECTRONICS US LP·Filed 2010·Application pending·0 cites
- 2635US7293569B2Alkylsilanes as solvents for low vapor pressure precursorsAIR LIQUIDE ELECTRONICS US LP·Filed 2006·Granted Nov 13, 2007·0 cites·23 claims
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