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AIXTRON INC
US9 patents
Top patents by PatentIndex Score
US7981473B2Jul 19, 2011
Transient enhanced atomic layer deposition
AIXTRON INC63 citations95
US7981472B2Jul 19, 2011
Methods of providing uniform gas delivery to a reactor
AIXTRON INC13 citations83
US9096932B2Aug 4, 2015
Methods for plasma processing
AIXTRON INC1 citations61
US9096933B2Aug 4, 2015
Methods for plasma processing
AIXTRON INC3 citations61
US9299956B2Mar 29, 2016
Method for deposition of high-performance coatings and encapsulated electronic devices
AIXTRON INC2 citations60
US7732308B2Jun 8, 2010
Process for depositing layers containing silicon and germanium
AIXTRON INC6 citations56
US9359674B2Jun 7, 2016
Apparatus and method for dielectric deposition
AIXTRON INC0 citations50
US9564329B2Feb 7, 2017
Method and apparatus for fabricating dielectric structures
AIXTRON INC1 citations43
US8906456B2Dec 9, 2014
Apparatus and method for high-throughput chemical vapor deposition
AIXTRON INC0 citations35