Assignee
AKAE NAONORI
JP·6 granted patents·1 pending application·989 citations·filing 2006–2011
Top patents by PatentIndex Score
7 records- 0198US8415258B2Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatusAKAE NAONORI·Filed 2011·Granted Apr 9, 2013·480 cites·19 claims
- 0298US8076251B2Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatusAKAE NAONORI·Filed 2010·Granted Dec 13, 2011·489 cites·17 claims
- 0384US8895457B2Method of manufacturing semiconductor device and substrate processing apparatusAKAE NAONORI·Filed 2011·Granted Nov 25, 2014·7 cites·20 claims
- 0481US8609551B2Method for manufacturing semiconductor device and substrate processing apparatusAKAE NAONORI·Filed 2008·Granted Dec 17, 2013·6 cites·24 claims
- 0580US8673790B2Method of manufacturing a semiconductor device, method of cleaning a process vessel, and substrate processing apparatusAKAE NAONORI·Filed 2011·Granted Mar 18, 2014·5 cites·17 claims
- 0666US8524580B2Manufacturing method of semiconductor substrate and substrate processing apparatusAKAE NAONORI·Filed 2010·Granted Sep 3, 2013·2 cites·7 claims
- 0738US2010136773A1Semiconductor Device Manufacturing Method and Substrate Processing ApparatusAKAE NAONORI·Filed 2006·Application pending·0 cites
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