Assignee
AKAO TOKUNOBU
JP·3 granted patents·5 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0170US8486222B2Substrate processing apparatus and method of manufacturing a semiconductor deviceAKAO TOKUNOBU·Filed 2011·Granted Jul 16, 2013·3 cites·9 claims
- 0259US8795433B2Substrate processing apparatusAKAO TOKUNOBU·Filed 2009·Granted Aug 5, 2014·1 cites·16 claims
- 0358US8557720B2Substrate processing apparatus and method of manufacturing a semiconductor deviceAKAO TOKUNOBU·Filed 2011·Granted Oct 15, 2013·1 cites·12 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →