Assignee
AKRION LLC
US16 patents
Top patents by PatentIndex Score
US6837944B2Jan 4, 2005
Cleaning and drying method and apparatus
AKRION LLC24 citations89
US6767877B2Jul 27, 2004
Method and system for chemical injection in silicon wafer processing
AKRION LLC67 citations89
US6766818B2Jul 27, 2004
Chemical concentration control device
AKRION LLC24 citations88
US6840250B2Jan 11, 2005
Nextgen wet process tank
AKRION LLC23 citations87
US6626189B2Sep 30, 2003
Method of processing substrates using pressurized mist generation
AKRION LLC13 citations82
US6532974B2Mar 18, 2003
Process tank with pressurized mist generation
AKRION LLC13 citations82
US6928750B2Aug 16, 2005
Membrane dryer
AKRION LLC10 citations71
US6842998B2Jan 18, 2005
Membrane dryer
AKRION LLC7 citations71
US6732749B2May 11, 2004
Particle barrier drain
AKRION LLC12 citations68
US6871657B2Mar 29, 2005
Low profile wafer carrier
AKRION LLC9 citations66
US6955727B2Oct 18, 2005
Substrate process tank with acoustical source transmission and method of processing substrates
AKRION LLC10 citations64
US6907890B2Jun 21, 2005
Capillary drying of substrates
AKRION LLC11 citations64
US6863836B2Mar 8, 2005
Method for removal of photoresist using sparger
AKRION LLC3 citations62
US6649018B2Nov 18, 2003
System for removal of photoresist using sparger
AKRION LLC4 citations62
US6818563B2Nov 16, 2004
Process and apparatus for removal of photoresist from semiconductor wafers using spray nozzles
AKRION LLC4 citations61
US6722056B2Apr 20, 2004
Drying vapor generation
AKRION LLC2 citations53