Assignee
AKRION TECHNOLOGIES INC
US·12 granted patents·79 citations·filing 2002–2007
Top patents by PatentIndex Score
12 records- 0190US7518288B2System for megasonic processing of an articleAKRION TECHNOLOGIES INC·Filed 2007·Granted Apr 14, 2009·8 cites·6 claims
- 0286US7211932B2Apparatus for megasonic processing of an articleAKRION TECHNOLOGIES INC·Filed 2006·Granted May 1, 2007·5 cites·22 claims
- 0384US7268469B2Transducer assembly for megasonic processing of an article and apparatus utilizing the sameAKRION TECHNOLOGIES INC·Filed 2006·Granted Sep 11, 2007·4 cites·58 claims
- 0472US7169253B2Process sequence for photoresist stripping and/or cleaning of photomasks for integrated circuit manufacturingAKRION TECHNOLOGIES INC·Filed 2004·Granted Jan 30, 2007·10 cites·9 claims
- 0570US7100304B2Megasonic cleaner and dryerAKRION TECHNOLOGIES INC·Filed 2004·Granted Sep 5, 2006·15 cites·9 claims
- 0668US7117876B2Method of cleaning a side of a thin flat substrate by applying sonic energy to the opposite side of the substrateAKRION TECHNOLOGIES INC·Filed 2003·Granted Oct 10, 2006·5 cites·9 claims
- 0766US7311847B2System and method for point-of-use filtration and purification of fluids used in substrate processingAKRION TECHNOLOGIES INC·Filed 2004·Granted Dec 25, 2007·10 cites·30 claims
- 0858US7185661B2Reciprocating megasonic probeAKRION TECHNOLOGIES INC·Filed 2002·Granted Mar 6, 2007·5 cites·18 claims
- 0951US7104268B2Megasonic cleaning system with buffered cavitation methodAKRION TECHNOLOGIES INC·Filed 2003·Granted Sep 12, 2006·10 cites·12 claims
- 1049US7156111B2Megasonic cleaning using supersaturated cleaning solutionAKRION TECHNOLOGIES INC·Filed 2004·Granted Jan 2, 2007·3 cites·22 claims
- 1148US7047989B2Sonic-energy cleaner system with gasified fluidAKRION TECHNOLOGIES INC·Filed 2003·Granted May 23, 2006·3 cites·15 claims
- 1247US7287537B2Megasonic probe energy directorAKRION TECHNOLOGIES INC·Filed 2002·Granted Oct 30, 2007·1 cites·16 claims
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