Assignee
AKUSTICA INC
US·22 granted patents·311 citations·filing 2003–2019
Top patents by PatentIndex Score
22 records- 0193US7763488B2Method of fabricating MEMS deviceAKUSTICA INC·Filed 2006·Granted Jul 27, 2010·26 cites·31 claims
- 0293US7202101B2Multi-metal layer MEMS structure and process for making the sameAKUSTICA INC·Filed 2004·Granted Apr 10, 2007·61 cites·4 claims
- 0391US10349188B2MEMS microphone system and methodAKUSTICA INC·Filed 2017·Granted Jul 9, 2019·6 cites·18 claims
- 0491US7049051B2Process for forming and acoustically connecting structures on a substrateAKUSTICA INC·Filed 2003·Granted May 23, 2006·35 cites·26 claims
- 0589US10442683B2Corrugated package for microelectromechanical system (MEMS) deviceAKUSTICA INC·Filed 2016·Granted Oct 15, 2019·5 cites·22 claims
- 0689US7640805B2Proof-mass with supporting structure on integrated circuit-MEMS platformAKUSTICA INC·Filed 2006·Granted Jan 5, 2010·20 cites·22 claims
- 0788US10555088B2MEMS microphone system having an electrode assemblyAKUSTICA INC·Filed 2017·Granted Feb 4, 2020·7 cites·18 claims
- 0886US7824943B2Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing sameAKUSTICA INC·Filed 2006·Granted Nov 2, 2010·13 cites·14 claims
- 0986US6943448B2Multi-metal layer MEMS structure and process for making the sameAKUSTICA INC·Filed 2003·Granted Sep 13, 2005·57 cites·6 claims
- 1086US6936524B2Ultrathin form factor MEMS microphones and microspeakersAKUSTICA INC·Filed 2003·Granted Aug 30, 2005·59 cites·28 claims
- 1181US7863714B2Monolithic MEMS and integrated circuit device having a barrier and method of fabricating the sameAKUSTICA INC·Filed 2006·Granted Jan 4, 2011·12 cites·52 claims
- 1276US9369804B2MEMS membrane overtravel stopAKUSTICA INC·Filed 2014·Granted Jun 14, 2016·5 cites·11 claims
- 1372US9781519B2Molded interconnect mircoelectromechanical system (MEMS) device packageAKUSTICA INC·Filed 2016·Granted Oct 3, 2017·2 cites·18 claims
- 1470US10070222B1Microphone system having microphone transducer in feedback loop with adjustable frequency -3dB point and improved settling speedAKUSTICA INC·Filed 2017·Granted Sep 4, 2018·2 cites·19 claims
- 1565US10972821B2MEMS microphone system with low pressure gap and back volumeAKUSTICA INC·Filed 2019·Granted Apr 6, 2021·0 cites·9 claims
- 1662US9686619B2MEMS device with acoustic leak control featuresAKUSTICA INC·Filed 2015·Granted Jun 20, 2017·1 cites·20 claims
- 1760US10448132B2MEMS microphone system with low pressure gap and back volumeAKUSTICA INC·Filed 2018·Granted Oct 15, 2019·0 cites·7 claims
- 1850US10555090B2Microphone with encapsulated moving electrodeAKUSTICA INC·Filed 2018·Granted Feb 4, 2020·0 cites·20 claims
- 1944US10063978B2Cantilevered shear resonance microphoneAKUSTICA INC·Filed 2016·Granted Aug 28, 2018·0 cites·18 claims
- 2040US10017377B2Protective coating on trench features of a wafer and method of fabrication thereofAKUSTICA INC·Filed 2016·Granted Jul 10, 2018·0 cites·15 claims
- 2138US10080082B2Microphone system having high acoustical overload pointAKUSTICA INC·Filed 2017·Granted Sep 18, 2018·0 cites·20 claims
- 2237US10199344B2Side ported MEMS sensor device package and method of manufacturing thereofAKUSTICA INC·Filed 2017·Granted Feb 5, 2019·0 cites·14 claims
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