Assignee

ALAM KHURSHID SYED

US·1 granted patent·11 citations·filing 2008–2008

Technology mixB81B1 B81C1 H10P1

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0181US8536059B2Equipment and methods for etching of MEMSALAM KHURSHID SYED·Filed 2008·Granted Sep 17, 2013·11 cites·21 claims

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