Assignee
AMRAY INC
US5 patents
Top patents by PatentIndex Score
US5216235AJun 1, 1993
Opto-mechanical automatic focusing system and method
AMRAY INC61 citations90
US5734164AMar 31, 1998
Charged particle apparatus having a canted column
AMRAY INC51 citations87
US4948971AAug 14, 1990
Vibration cancellation system for scanning electron microscopes
AMRAY INC21 citations76
US5049745ASep 17, 1991
Phase-compensating vibration cancellation system for scanning electron microscopes
AMRAY INC15 citations68
US4922196AMay 1, 1990
Beam-blanking apparatus for stroboscopic electron beam instruments
AMRAY INC5 citations58