Assignee
AMTECH SYSTEMS INC
US10 patents
Top patents by PatentIndex Score
US5364667ANov 15, 1994
Photo-assisted chemical vapor deposition method
AMTECH SYSTEMS INC524 citations93
US5888048AMar 30, 1999
Automatic wafer boat loading
AMTECH SYSTEMS INC17 citations91
US5765982AJun 16, 1998
Automatic wafer boat loading system and method
AMTECH SYSTEMS INC29 citations91
US5215588AJun 1, 1993
Photo-CVD system
AMTECH SYSTEMS INC70 citations91
US6537010B2Mar 25, 2003
Wafer boat support and method for twin tower wafer boat loader
AMTECH SYSTEMS INC14 citations80
US6143477ANov 7, 2000
Dual wavelength UV lamp reactor and method for cleaning/ashing semiconductor wafers
AMTECH SYSTEMS INC23 citations80
US4767251AAug 30, 1988
Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes
AMTECH SYSTEMS INC22 citations75
US6352399B1Mar 5, 2002
Twin tower wafer boat loading system and method
AMTECH SYSTEMS INC11 citations72
US6565304B2May 20, 2003
Wafer boat elevator system and method
AMTECH SYSTEMS INC5 citations58
US9520531B2Dec 13, 2016
Systems and methods for depositing and charging solar cell layers
AMTECH SYSTEMS INC0 citations51