P

Assignee

ANDO YASUNORI

JP2 patents

Top patents by PatentIndex Score

US8394232B1Mar 12, 2013

Plasma processing apparatus

ANDO YASUNORI2 citations58
US9058982B2Jun 16, 2015

Silicon oxynitride film and method for forming same, and semiconductor device

ANDO YASUNORI0 citations48