Assignee

ANDRITZKE LOTHAR

DE·1 granted patent·1 pending application·0 citations·filing 2008–2009

Technology mixH10P2 B65G1 B65H1 G03F1 Y10S1 Y10T1

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2 records

0131US8168036B2Apparatus and method for the removal of pellicles from masksANDRITZKE LOTHAR·Filed 2008·Granted May 1, 2012·0 cites·16 claims
0226US2010166536A1Apparatus for the separating of stacked plate-shaped elementsANDRITZKE LOTHAR·Filed 2009·Application pending·0 cites

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