Assignee
ANPO AKIHITO
JP·3 granted patents·4 citations·filing 2010–2010
Top patents by PatentIndex Score
3 records- 0166US8471225B2Charged particle beam writing method and apparatus thereforANPO AKIHITO·Filed 2010·Granted Jun 25, 2013·2 cites·8 claims
- 0266US8307314B2Write error verification method of writing apparatus and creation apparatus of write error verification data for writing apparatusANPO AKIHITO·Filed 2010·Granted Nov 6, 2012·2 cites·10 claims
- 0339US8755924B2Charged particle beam writing method and apparatus thereforANPO AKIHITO·Filed 2010·Granted Jun 17, 2014·0 cites·5 claims
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