Assignee
ANTONELLI GEORGE ANDREW
US·5 granted patents·629 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0198US8557712B1PECVD flowable dielectric gap fillANTONELLI GEORGE ANDREW·Filed 2008·Granted Oct 15, 2013·556 cites·21 claims
- 0294US8288292B2Depositing conformal boron nitride film by CVD without plasmaANTONELLI GEORGE ANDREW·Filed 2010·Granted Oct 16, 2012·16 cites·30 claims
- 0394US8217513B2Remote plasma processing of interface surfacesANTONELLI GEORGE ANDREW·Filed 2011·Granted Jul 10, 2012·24 cites·19 claims
- 0494US8084339B2Remote plasma processing of interface surfacesANTONELLI GEORGE ANDREW·Filed 2009·Granted Dec 27, 2011·29 cites·16 claims
- 0582US8479683B2Apparatus including a plasma chamber and controller including instructions for forming a boron nitride layerANTONELLI GEORGE ANDREW·Filed 2012·Granted Jul 9, 2013·4 cites·1 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →