Assignee

AOYAMA SHINTARO

JP·1 granted patent·1 citations·filing 2010–2010

Technology mixB32B1 C23C1 H10D1 H10P1

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1 record

0155US8722548B2Structures and techniques for atomic layer depositionAOYAMA SHINTARO·Filed 2010·Granted May 13, 2014·1 cites·15 claims

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