Assignee
APLEX INC
US13 patents
Top patents by PatentIndex Score
US6059643AMay 9, 2000
Apparatus and method for polishing a flat surface using a belted polishing pad
APLEX INC297 citations95
US6000997ADec 14, 1999
Temperature regulation in a CMP process
APLEX INC101 citations95
US6086456AJul 11, 2000
Polishing method using a hydrostatic fluid bearing support having fluctuating fluid flow
APLEX INC19 citations91
US6126527AOct 3, 2000
Seal for polishing belt center support having a single movable sealed cavity
APLEX INC26 citations90
US6042457AMar 28, 2000
Conditioner assembly for a chemical mechanical polishing apparatus
APLEX INC28 citations89
US5957764ASep 28, 1999
Modular wafer polishing apparatus and method
APLEX INC25 citations89
US6126512AOct 3, 2000
Robust belt tracking and control system for hostile environment
APLEX INC30 citations86
US5947802ASep 7, 1999
Wafer shuttle system
APLEX INC46 citations86
US6149512ANov 21, 2000
Linear pad conditioning apparatus
APLEX INC16 citations78
US6159083ADec 12, 2000
Polishing head for a chemical mechanical polishing apparatus
APLEX INC14 citations71
US6146249ANov 14, 2000
Apparatus and method for polishing a flat surface using a belted polishing pad
APLEX INC6 citations69
US6062961AMay 16, 2000
Wafer polishing head drive
APLEX INC2 citations54
US6098901AAug 8, 2000
Apparatus for dispensing slurry
APLEX INC5 citations53