Assignee
APPLEID MATERIALS INC
US·2 granted patents·20 citations·filing 2001–2002
Top patents by PatentIndex Score
2 records- 0171US6605478B2Kill index analysis for automatic defect classification in semiconductor wafersAPPLEID MATERIALS INC·Filed 2001·Granted Aug 12, 2003·13 cites·22 claims
- 0257US7270761B2Fluorine free integrated process for etching aluminum including chamber dry cleanAPPLEID MATERIALS INC·Filed 2002·Granted Sep 18, 2007·7 cites·34 claims
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