Assignee
APPLIED MARTERIALS INC
US·1 granted patent·1 pending application·7 citations·filing 2006–2008
Top patents by PatentIndex Score
2 records- 0175US7554334B2Matching network characterization using variable impedance analysisAPPLIED MARTERIALS INC·Filed 2006·Granted Jun 30, 2009·7 cites·19 claims
- 0243US2010018648A1Workpiece support for a plasma reactor with controlled apportionment of rf power to a process kit ringAPPLIED MARTERIALS INC·Filed 2008·Application pending·0 cites
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