Assignee
APPLIED MATERIALS SOUTH EAST A
SG·7 granted patents·111 citations·filing 2005–2008
Top patents by PatentIndex Score
7 records- 0193US7633041B2Apparatus for determining optimum position of focus of an imaging systemAPPLIED MATERIALS SOUTH EAST A·Filed 2006·Granted Dec 15, 2009·20 cites·10 claims
- 0292US7714998B2Image splitting in optical inspection systemsAPPLIED MATERIALS SOUTH EAST A·Filed 2007·Granted May 11, 2010·34 cites·22 claims
- 0391US7719674B2Image splitting in optical inspection systemsAPPLIED MATERIALS SOUTH EAST A·Filed 2007·Granted May 18, 2010·29 cites·16 claims
- 0486US7804993B2Method and apparatus for detecting defects in wafers including alignment of the wafer images so as to induce the same smear in all imagesAPPLIED MATERIALS SOUTH EAST A·Filed 2005·Granted Sep 28, 2010·15 cites·8 claims
- 0575US7826049B2Inspection tools supporting multiple operating states for multiple detector arrangementsAPPLIED MATERIALS SOUTH EAST A·Filed 2008·Granted Nov 2, 2010·4 cites·27 claims
- 0674US7813541B2Method and apparatus for detecting defects in wafersAPPLIED MATERIALS SOUTH EAST A·Filed 2005·Granted Oct 12, 2010·9 cites·15 claims
- 0761US7804590B2Multi mode inspection method and apparatusAPPLIED MATERIALS SOUTH EAST A·Filed 2008·Granted Sep 28, 2010·0 cites·12 claims
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