Assignee

APPLIED MATERIELS INC

US·1 granted patent·534 citations·filing 1997–1997

Technology mixC23C1 H01F1 H01J1 H10P1

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0196US6095083AVacuum processing chamber having multi-mode accessAPPLIED MATERIELS INC·Filed 1997·Granted Aug 1, 2000·534 cites·42 claims

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