Assignee

APPLIED MATERISALS INC

US·1 granted patent·69 citations·filing 2006–2006

Technology mixC23C1 H01J1 H10P1 H10W1

Top patents by PatentIndex Score

1 record

0195US7850779B2Apparatus and process for plasma-enhanced atomic layer depositionAPPLIED MATERISALS INC·Filed 2006·Granted Dec 14, 2010·69 cites·6 claims

Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →