Assignee
APPLIED MATRIALS INC
US3 patents
Top patents by PatentIndex Score
US6573522B2Jun 3, 2003
Locator pin integrated with sensor for detecting semiconductor substrate carrier
APPLIED MATRIALS INC15 citations83
US7985689B2Jul 26, 2011
Patterning 3D features in a substrate
APPLIED MATRIALS INC6 citations54
US6847164B2Jan 25, 2005
Current-stabilizing illumination of photocathode electron beam source
APPLIED MATRIALS INC1 citations36