Assignee
APPLIED SCIENCE & TECH INC
US·31 granted patents·3 pending applications·2,580 citations·filing 1989–2004
Top patents by PatentIndex Score
34 records- 0198US6559408B2Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2002·Granted May 6, 2003·104 cites·15 claims
- 0298US6150628AToroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 1997·Granted Nov 21, 2000·458 cites·44 claims
- 0398US5501740AMicrowave plasma reactorAPPLIED SCIENCE & TECH INC·Filed 1994·Granted Mar 26, 1996·483 cites·41 claims
- 0497US6887339B1RF power supply with integrated matching networkAPPLIED SCIENCE & TECH INC·Filed 2001·Granted May 3, 2005·223 cites·21 claims
- 0597US6815633B1Inductively-coupled toroidal plasma sourceAPPLIED SCIENCE & TECH INC·Filed 2001·Granted Nov 9, 2004·207 cites·64 claims
- 0697US6388226B1Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2000·Granted May 14, 2002·117 cites·36 claims
- 0796US6924455B1Integrated plasma chamber and inductively-coupled toroidal plasma sourceAPPLIED SCIENCE & TECH INC·Filed 2001·Granted Aug 2, 2005·82 cites·51 claims
- 0896US6486431B1Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2000·Granted Nov 26, 2002·56 cites·51 claims
- 0995US6872909B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselAPPLIED SCIENCE & TECH INC·Filed 2003·Granted Mar 29, 2005·55 cites·10 claims
- 1095US6781317B1Methods and apparatus for calibration and metrology for an integrated RF generator systemAPPLIED SCIENCE & TECH INC·Filed 2003·Granted Aug 24, 2004·72 cites·45 claims
- 1195US6552296B2Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2001·Granted Apr 22, 2003·62 cites·20 claims
- 1291US6664497B2Toroidal low-field reactive gas sourceAPPLIED SCIENCE & TECH INC·Filed 2002·Granted Dec 16, 2003·26 cites·49 claims
- 1389US5688382AMicrowave plasma deposition source and method of filling high aspect-ratio features on a substrateAPPLIED SCIENCE & TECH INC·Filed 1995·Granted Nov 18, 1997·68 cites·14 claims
- 1487US5556475AMicrowave plasma reactorAPPLIED SCIENCE & TECH INC·Filed 1993·Granted Sep 17, 1996·52 cites·39 claims
- 1586US6149367AEnd effector assembly for inclusion in a system for producing uniform deposits on a waferAPPLIED SCIENCE & TECH INC·Filed 1998·Granted Nov 21, 2000·39 cites·5 claims
- 1686US5932180AOzone and other reactive gas generator cell and systemAPPLIED SCIENCE & TECH INC·Filed 1997·Granted Aug 3, 1999·58 cites·24 claims
- 1784US5206471AMicrowave activated gas generatorAPPLIED SCIENCE & TECH INC·Filed 1991·Granted Apr 27, 1993·52 cites·26 claims
- 1881US5621331AAutomatic impedance matching apparatus and methodAPPLIED SCIENCE & TECH INC·Filed 1995·Granted Apr 15, 1997·60 cites·14 claims
- 1978US6217272B1In-line sputter deposition systemAPPLIED SCIENCE & TECH INC·Filed 1999·Granted Apr 17, 2001·45 cites·27 claims
- 2075US5153406AMicrowave sourceAPPLIED SCIENCE & TECH INC·Filed 1989·Granted Oct 6, 1992·29 cites·29 claims
- 2173US6234788B1Disk furnace for thermal processingAPPLIED SCIENCE & TECH INC·Filed 1999·Granted May 22, 2001·42 cites·28 claims
- 2272US6786976B1Method and system for cleaning semiconductor elementsAPPLIED SCIENCE & TECH INC·Filed 1999·Granted Sep 7, 2004·29 cites·15 claims
- 2371US6117238AEnd effector assembly for inclusion in a system for producing uniform deposits on a waferAPPLIED SCIENCE & TECH INC·Filed 1996·Granted Sep 12, 2000·21 cites·5 claims
- 2467US6805791B2Ozonated water flow and concentration control apparatusAPPLIED SCIENCE & TECH INC·Filed 2002·Granted Oct 19, 2004·10 cites·5 claims
- 2566US5405645AHigh growth rate plasma diamond deposition process and method of controlling sameAPPLIED SCIENCE & TECH INC·Filed 1993·Granted Apr 11, 1995·27 cites·9 claims
- 2665US5279866AProcess for depositing wear-resistant coatingsAPPLIED SCIENCE & TECH INC·Filed 1993·Granted Jan 18, 1994·25 cites·19 claims
- 2756US5518759AHigh growth rate plasma diamond deposition process and method of controlling sameAPPLIED SCIENCE & TECH INC·Filed 1995·Granted May 21, 1996·21 cites·16 claims
- 2852US5625259AMicrowave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tubeAPPLIED SCIENCE & TECH INC·Filed 1995·Granted Apr 29, 1997·25 cites·23 claims
- 2951US6083357ASystem for and method of providing a controlled deposition on wafersAPPLIED SCIENCE & TECH INC·Filed 1997·Granted Jul 4, 2000·7 cites·18 claims
- 3047US5568015AFluid-cooled dielectric window for a plasma systemAPPLIED SCIENCE & TECH INC·Filed 1995·Granted Oct 22, 1996·18 cites·19 claims
- 3145US2006118240A1Methods and apparatus for downstream dissociation of gasesAPPLIED SCIENCE & TECH INC·Filed 2004·Application pending·0 cites
- 3245US2005103439A1Stabilization of electronegative plasmas with feedback control of RF generator systemsAPPLIED SCIENCE & TECH INC·Filed 2004·Application pending·0 cites
- 3341US5142198AMicrowave reactive gas discharge deviceAPPLIED SCIENCE & TECH INC·Filed 1989·Granted Aug 25, 1992·7 cites·16 claims
- 3441US2003213559A1Stabilization of electronegative plasmas with feedback control of RF generator systemsAPPLIED SCIENCE & TECH INC·Filed 2002·Application pending·0 cites
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