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ARAI NORIAKI

JP3 patents

Top patents by PatentIndex Score

US8153966B2Apr 10, 2012

Electrode unit and charged particle beam device

ARAI NORIAKI11 citations82

US8835884B2Sep 16, 2014

Charged particle beam apparatus with cleaning photo-irradiation apparatus

ARAI NORIAKI3 citations60

US8698080B2Apr 15, 2014

Scanning electron microscope

ARAI NORIAKI0 citations51