Assignee
ASCENTOOL INC
US11 patents
Top patents by PatentIndex Score
US7806641B2Oct 5, 2010
Substrate processing system having improved substrate transport system
ASCENTOOL INC10 citations82
US7588669B2Sep 15, 2009
Single-process-chamber deposition system
ASCENTOOL INC9 citations82
US7534080B2May 19, 2009
Vacuum processing and transfer system
ASCENTOOL INC9 citations82
US12540401B2Feb 3, 2026
Large capacity deposition system
ASCENTOOL INC0 citations61
US12157942B2Dec 3, 2024
Versatile vacuum deposition sources and system thereof
ASCENTOOL INC0 citations61
US11359284B2Jun 14, 2022
High throughput vacuum deposition sources and system
ASCENTOOL INC0 citations61
US10954598B2Mar 23, 2021
High throughput vacuum deposition sources and system
ASCENTOOL INC0 citations61
US7638022B2Dec 29, 2009
Magnetron source for deposition on large substrates
ASCENTOOL INC2 citations61
US7874783B2Jan 25, 2011
Multi-chamber vacuum processing and transfer system
ASCENTOOL INC0 citations51
US12170185B2Dec 17, 2024
Vacuum deposition into trenches and vias and etch of trenches and via
ASCENTOOL INC0 citations50
US12154770B2Nov 26, 2024
Vacuum deposition into trenches and vias
ASCENTOOL INC0 citations50