Assignee
ASM INT
NL·202 granted patents·12 pending applications·30,274 citations·filing 1990–2015
Top patents by PatentIndex Score
214 records- 0199US9368352B2Methods for forming doped silicon oxide thin filmsASM INT·Filed 2014·Granted Jun 14, 2016·469 cites·19 claims
- 0299US9257303B2Selective formation of metallic films on metallic surfacesASM INT·Filed 2015·Granted Feb 9, 2016·82 cites·19 claims
- 0399US9153441B2Methods for forming doped silicon oxide thin filmsASM INT·Filed 2014·Granted Oct 6, 2015·473 cites·17 claims
- 0499US8679958B2Methods for forming doped silicon oxide thin filmsASM INT·Filed 2012·Granted Mar 25, 2014·484 cites·26 claims
- 0599US7923382B2Method for forming roughened surfaceASM INT·Filed 2009·Granted Apr 12, 2011·347 cites·19 claims
- 0699US7601223B2Showerhead assembly and ALD methodsASM INT·Filed 2004·Granted Oct 13, 2009·607 cites·33 claims
- 0799US7563715B2Method of producing thin filmsASM INT·Filed 2005·Granted Jul 21, 2009·513 cites·20 claims
- 0899US7410666B2Metal nitride carbide deposition by ALDASM INT·Filed 2005·Granted Aug 12, 2008·503 cites·27 claims
- 0999US7156380B2Safe liquid source containersASM INT·Filed 2003·Granted Jan 2, 2007·506 cites·11 claims
- 1099US7144809B2Production of elemental films using a boron-containing reducing agentASM INT·Filed 2004·Granted Dec 5, 2006·450 cites·33 claims
- 1199US6986914B2Metal nitride deposition by ALD with reduction pulseASM INT·Filed 2002·Granted Jan 17, 2006·503 cites·41 claims
- 1299US6933225B2Graded thin filmsASM INT·Filed 2002·Granted Aug 23, 2005·147 cites·33 claims
- 1399US6821889B2Production of elemental thin films using a boron-containing reducing agentASM INT·Filed 2002·Granted Nov 23, 2004·349 cites·54 claims
- 1498US9112003B2Selective formation of metallic films on metallic surfacesASM INT·Filed 2012·Granted Aug 18, 2015·93 cites·30 claims
- 1598US7971861B2Safe liquid source containersASM INT·Filed 2009·Granted Jul 5, 2011·43 cites·21 claims
- 1698US7955979B2Method of growing electrical conductorsASM INT·Filed 2008·Granted Jun 7, 2011·88 cites·15 claims
- 1798US7927942B2Selective silicide processASM INT·Filed 2008·Granted Apr 19, 2011·97 cites·31 claims
- 1898US7851019B2Method for controlling the sublimation of reactantsASM INT·Filed 2008·Granted Dec 14, 2010·551 cites·19 claims
- 1998US7824492B2Method of growing oxide thin filmsASM INT·Filed 2003·Granted Nov 2, 2010·540 cites·39 claims
- 2098US7754621B2Process for producing zirconium oxide thin filmsASM INT·Filed 2007·Granted Jul 13, 2010·615 cites·23 claims
- 2198US7682657B2Sequential chemical vapor depositionASM INT·Filed 2003·Granted Mar 23, 2010·602 cites·4 claims
- 2298US7674726B2Parts for deposition reactorsASM INT·Filed 2005·Granted Mar 9, 2010·376 cites·9 claims
- 2398US7638170B2Low resistivity metal carbonitride thin film deposition by atomic layer depositionASM INT·Filed 2007·Granted Dec 29, 2009·69 cites·22 claims
- 2498US7601225B2System for controlling the sublimation of reactantsASM INT·Filed 2003·Granted Oct 13, 2009·564 cites·25 claims
- 2598US7419903B2Thin filmsASM INT·Filed 2005·Granted Sep 2, 2008·88 cites·17 claims
- 2698US7312156B2Method and apparatus for supporting a semiconductor wafer during processingASM INT·Filed 2004·Granted Dec 25, 2007·294 cites·25 claims
- 2798US7256375B2Susceptor plate for high temperature heat treatmentASM INT·Filed 2003·Granted Aug 14, 2007·388 cites·30 claims
- 2898US7241677B2Process for producing integrated circuits including reduction using gaseous organic compoundsASM INT·Filed 2005·Granted Jul 10, 2007·119 cites·32 claims
- 2998US6887795B2Method of growing electrical conductorsASM INT·Filed 2002·Granted May 3, 2005·158 cites·32 claims
- 3098US6876191B2Apparatus for treating wafers, provided with a sensor boxASM INT·Filed 2003·Granted Apr 5, 2005·419 cites·22 claims
- 3198US6820570B2Atomic layer deposition reactorASM INT·Filed 2002·Granted Nov 23, 2004·647 cites·13 claims
- 3298US6746240B2Process tube support sleeve with circumferential channelsASM INT·Filed 2003·Granted Jun 8, 2004·397 cites·58 claims
- 3398US6727169B1Method of making conformal lining layers for damascene metallizationASM INT·Filed 2000·Granted Apr 27, 2004·225 cites·42 claims
- 3498US6703708B2Graded thin filmsASM INT·Filed 2002·Granted Mar 9, 2004·123 cites·36 claims
- 3598US6686271B2Protective layers prior to alternating layer depositionASM INT·Filed 2002·Granted Feb 3, 2004·245 cites·65 claims
- 3698US6613685B1Method for supporting a semiconductor wafer during processingASM INT·Filed 2000·Granted Sep 2, 2003·379 cites·46 claims
- 3798US6461439B1Apparatus for supporting a semiconductor wafer during processingASM INT·Filed 2000·Granted Oct 8, 2002·371 cites·44 claims
- 3898US6183565B1Method and apparatus for supporting a semiconductor wafer during processingASM INT·Filed 1999·Granted Feb 6, 2001·502 cites·41 claims
- 3997US7494927B2Method of growing electrical conductorsASM INT·Filed 2003·Granted Feb 24, 2009·127 cites·45 claims
- 4097US7045406B2Method of forming an electrode with adjusted work functionASM INT·Filed 2003·Granted May 16, 2006·155 cites·12 claims
- 4197US6939579B2ALD reactor and method with controlled wall temperatureASM INT·Filed 2001·Granted Sep 6, 2005·372 cites·20 claims
- 4297US6902763B1Method for depositing nanolaminate thin films on sensitive surfacesASM INT·Filed 2000·Granted Jun 7, 2005·191 cites·21 claims
- 4397US6831315B2Conformal thin films over textured capacitor electrodesASM INT·Filed 2001·Granted Dec 14, 2004·128 cites·4 claims
- 4497US6800552B2Deposition of transition metal carbidesASM INT·Filed 2002·Granted Oct 5, 2004·91 cites·35 claims
- 4597US6764546B2Apparatus and method for growth of a thin filmASM INT·Filed 2002·Granted Jul 20, 2004·63 cites·30 claims
- 4697US6607602B1Device for processing semiconductor wafersASM INT·Filed 1998·Granted Aug 19, 2003·349 cites·22 claims
- 4797US6390753B1System for loading, processing and unloading substrates arranged on a carrierASM INT·Filed 1998·Granted May 21, 2002·373 cites·5 claims
- 4897US6357984B1Storage assembly for wafersASM INT·Filed 1998·Granted Mar 19, 2002·356 cites·9 claims
- 4997US6139239ASystem for transferring wafers from cassettes to furnaces and methodASM INT·Filed 1999·Granted Oct 31, 2000·343 cites·19 claims
- 5096US7998883B2Process for producing zirconium oxide thin filmsASM INT·Filed 2010·Granted Aug 16, 2011·26 cites·20 claims
Showing the top 50 of 214 patent records by PatentIndex Score.
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