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NL37 patents
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US10147600B2Dec 4, 2018
Methods for forming doped silicon oxide thin films
ASM INT NV417 citations99
US9875893B2Jan 23, 2018
Methods for forming doped silicon oxide thin films
ASM INT NV419 citations99
US9564314B2Feb 7, 2017
Methods for forming doped silicon oxide thin films
ASM INT NV465 citations99
US10157786B2Dec 18, 2018
Selective formation of metallic films on metallic surfaces
ASM INT NV55 citations98
US10049924B2Aug 14, 2018
Selective formation of metallic films on metallic surfaces
ASM INT NV53 citations98
US9679808B2Jun 13, 2017
Selective formation of metallic films on metallic surfaces
ASM INT NV57 citations98
US9502289B2Nov 22, 2016
Selective formation of metallic films on metallic surfaces
ASM INT NV86 citations98
US9831094B2Nov 28, 2017
Enhanced thin film deposition
ASM INT NV13 citations92
US10510530B2Dec 17, 2019
Methods for forming doped silicon oxide thin films
ASM INT NV3 citations84
US10308673B2Jun 4, 2019
Synthesis and use of precursors for ALD of tellurium and selenium thin films
ASM INT NV4 citations84
US9783563B2Oct 10, 2017
Synthesis and use of precursors for ALD of tellurium and selenium thin films
ASM INT NV4 citations84
US9469899B2Oct 18, 2016
Selective deposition of noble metal thin films
ASM INT NV6 citations83
US10056249B2Aug 21, 2018
Atomic layer deposition of antimony oxide films
ASM INT NV4 citations82
US9587307B2Mar 7, 2017
Enhanced deposition of noble metals
ASM INT NV5 citations82
US11814400B2Nov 14, 2023
Synthesis and use of precursors for ALD of tellurium and selenium thin films
ASM INT NV2 citations73
US11302527B2Apr 12, 2022
Methods for forming doped silicon oxide thin films
ASM INT NV1 citations73
US11072622B2Jul 27, 2021
Synthesis and use of precursors for ALD of tellurium and selenium thin films
ASM INT NV2 citations73
US11056385B2Jul 6, 2021
Selective formation of metallic films on metallic surfaces
ASM INT NV1 citations73
US10964534B2Mar 30, 2021
Enhanced thin film deposition
ASM INT NV3 citations73
US10784105B2Sep 22, 2020
Methods for forming doped silicon oxide thin films
ASM INT NV2 citations73
US10297444B2May 21, 2019
Enhanced thin film deposition
ASM INT NV2 citations73
US10043880B2Aug 7, 2018
Metal silicide, metal germanide, methods for making the same
ASM INT NV3 citations73
US9646820B2May 9, 2017
Methods for forming conductive titanium oxide thin films
ASM INT NV3 citations73
US9634106B2Apr 25, 2017
Doped metal germanide and methods for making the same
ASM INT NV2 citations73
US11121014B2Sep 14, 2021
Dummy wafer storage cassette
ASM INT NV2 citations72
US10344378B2Jul 9, 2019
Precursors and methods for atomic layer deposition of transition metal oxides
ASM INT NV1 citations72
US9677173B2Jun 13, 2017
Precursors and methods for atomic layer deposition of transition metal oxides
ASM INT NV3 citations72
US10738382B2Aug 11, 2020
Substrate processing apparatus
ASM INT NV3 citations66
US11555242B2Jan 17, 2023
Precursors and methods for atomic layer deposition of transition metal oxides
ASM INT NV0 citations62
US11549177B2Jan 10, 2023
Process for passivating dielectric films
ASM INT NV0 citations62
US9514934B2Dec 6, 2016
Atomic layer deposition of antimony oxide films
ASM INT NV1 citations61
US11339474B2May 24, 2022
Atomic layer deposition apparatus and method for processing substrates using an apparatus
ASM INT NV0 citations60
US10648078B2May 12, 2020
Atomic layer deposition apparatus and method for processing substrates using an apparatus
ASM INT NV1 citations60
US10553440B2Feb 4, 2020
Methods for depositing nickel films and for making nickel silicide and nickel germanide
ASM INT NV0 citations52
US9816203B2Nov 14, 2017
Crystalline strontium titanate and methods of forming the same
ASM INT NV0 citations52
US10699899B2Jun 30, 2020
Atomic layer deposition of antimony oxide films
ASM INT NV0 citations50
US10858738B2Dec 8, 2020
Wafer boat cooldown device
ASM INT NV0 citations38