Assignee
ASM INT NV
NL·37 granted patents·4 pending applications·1,623 citations·filing 2013–2022
Top patents by PatentIndex Score
41 records- 0198US10157786B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2016·Granted Dec 18, 2018·55 cites·21 claims
- 0298US10147600B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2018·Granted Dec 4, 2018·417 cites·20 claims
- 0398US10049924B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2017·Granted Aug 14, 2018·53 cites·20 claims
- 0498US9875893B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2017·Granted Jan 23, 2018·419 cites·20 claims
- 0598US9679808B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2016·Granted Jun 13, 2017·57 cites·20 claims
- 0698US9564314B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2015·Granted Feb 7, 2017·465 cites·28 claims
- 0798US9502289B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2015·Granted Nov 22, 2016·86 cites·31 claims
- 0896US11814400B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsASM INT NV·Filed 2021·Granted Nov 14, 2023·2 cites·19 claims
- 0996US9831094B2Enhanced thin film depositionASM INT NV·Filed 2015·Granted Nov 28, 2017·13 cites·14 claims
- 1093US9677173B2Precursors and methods for atomic layer deposition of transition metal oxidesASM INT NV·Filed 2016·Granted Jun 13, 2017·3 cites·23 claims
- 1192US10510530B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2018·Granted Dec 17, 2019·3 cites·18 claims
- 1291US10308673B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsASM INT NV·Filed 2017·Granted Jun 4, 2019·4 cites·20 claims
- 1390US10964534B2Enhanced thin film depositionASM INT NV·Filed 2019·Granted Mar 30, 2021·3 cites·20 claims
- 1490US9783563B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsASM INT NV·Filed 2015·Granted Oct 10, 2017·4 cites·20 claims
- 1589US10784105B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2019·Granted Sep 22, 2020·2 cites·20 claims
- 1688US10056249B2Atomic layer deposition of antimony oxide filmsASM INT NV·Filed 2016·Granted Aug 21, 2018·4 cites·20 claims
- 1788US10043880B2Metal silicide, metal germanide, methods for making the sameASM INT NV·Filed 2017·Granted Aug 7, 2018·3 cites·14 claims
- 1887US11302527B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2020·Granted Apr 12, 2022·1 cites·20 claims
- 1987US10344378B2Precursors and methods for atomic layer deposition of transition metal oxidesASM INT NV·Filed 2017·Granted Jul 9, 2019·1 cites·20 claims
- 2087US9469899B2Selective deposition of noble metal thin filmsASM INT NV·Filed 2014·Granted Oct 18, 2016·6 cites·17 claims
- 2186US11072622B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsASM INT NV·Filed 2019·Granted Jul 27, 2021·2 cites·10 claims
- 2286US9587307B2Enhanced deposition of noble metalsASM INT NV·Filed 2013·Granted Mar 7, 2017·5 cites·18 claims
- 2385US10297444B2Enhanced thin film depositionASM INT NV·Filed 2017·Granted May 21, 2019·2 cites·20 claims
- 2483US9634106B2Doped metal germanide and methods for making the sameASM INT NV·Filed 2015·Granted Apr 25, 2017·2 cites·18 claims
- 2581US2023031720A1Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2022·Application pending·0 cites
- 2679US11555242B2Precursors and methods for atomic layer deposition of transition metal oxidesASM INT NV·Filed 2019·Granted Jan 17, 2023·0 cites·12 claims
- 2779US11056385B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2018·Granted Jul 6, 2021·1 cites·18 claims
- 2879US9646820B2Methods for forming conductive titanium oxide thin filmsASM INT NV·Filed 2014·Granted May 9, 2017·3 cites·21 claims
- 2978US11121014B2Dummy wafer storage cassetteASM INT NV·Filed 2018·Granted Sep 14, 2021·2 cites·10 claims
- 3077US11549177B2Process for passivating dielectric filmsASM INT NV·Filed 2019·Granted Jan 10, 2023·0 cites·19 claims
- 3169US9514934B2Atomic layer deposition of antimony oxide filmsASM INT NV·Filed 2015·Granted Dec 6, 2016·1 cites·20 claims
- 3268US10738382B2Substrate processing apparatusASM INT NV·Filed 2014·Granted Aug 11, 2020·3 cites·6 claims
- 3365US10648078B2Atomic layer deposition apparatus and method for processing substrates using an apparatusASM INT NV·Filed 2015·Granted May 12, 2020·1 cites·9 claims
- 3465US9816203B2Crystalline strontium titanate and methods of forming the sameASM INT NV·Filed 2015·Granted Nov 14, 2017·0 cites·20 claims
- 3564US2020335342A1Methods for depositing thin films comprising indium nitride by atomic layer depositionASM INT NV·Filed 2020·Application pending·0 cites
- 3663US2019081149A1Metal silicide, metal germanide, methods for making the sameASM INT NV·Filed 2018·Application pending·0 cites
- 3762US10699899B2Atomic layer deposition of antimony oxide filmsASM INT NV·Filed 2018·Granted Jun 30, 2020·0 cites·19 claims
- 3856US11339474B2Atomic layer deposition apparatus and method for processing substrates using an apparatusASM INT NV·Filed 2020·Granted May 24, 2022·0 cites·6 claims
- 3953US10553440B2Methods for depositing nickel films and for making nickel silicide and nickel germanideASM INT NV·Filed 2016·Granted Feb 4, 2020·0 cites·11 claims
- 4049US2017076935A1Floating wafer track with lateral stabilization mechanismASM INT NV·Filed 2016·Application pending·0 cites
- 4142US10858738B2Wafer boat cooldown deviceASM INT NV·Filed 2019·Granted Dec 8, 2020·0 cites·18 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →