Assignee
ASM INTERNATIONAL NV
NL·4 granted patents·1,660 citations·filing 2001–2003
Top patents by PatentIndex Score
4 records- 0198US6858524B2Method of depositing barrier layer for metal gatesASM INTERNATIONAL NV·Filed 2003·Granted Feb 22, 2005·627 cites·19 claims
- 0298US6660660B2Methods for making a dielectric stack in an integrated circuitASM INTERNATIONAL NV·Filed 2001·Granted Dec 9, 2003·354 cites·5 claims
- 0396US6858546B2Method of depositing rare earth oxide thin filmsASM INTERNATIONAL NV·Filed 2002·Granted Feb 22, 2005·120 cites·22 claims
- 0493US6889864B2Source chemical container assemblyASM INTERNATIONAL NV·Filed 2002·Granted May 10, 2005·559 cites·10 claims
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