Assignee

ASM ITERNAT N V

FI·1 granted patent·10 citations·filing 2006–2006

Technology mixC23C1 C30B1 G01F1 Y10T1

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0186US7374941B2Active reactant vapor pulse monitoring in a chemical reactorASM ITERNAT N V·Filed 2006·Granted May 20, 2008·10 cites·17 claims

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