Assignee
ASM LITHOGRAPHY
NL5 patents
Top patents by PatentIndex Score
US5801832ASep 1, 1998
Method of and device for repetitively imaging a mask pattern on a substrate using five measuring axes
ASM LITHOGRAPHY181 citations97
US5602683AFeb 11, 1997
Lens system with lens elements arranged in a gas-filled holder and photolithographic apparatus including such a system
ASM LITHOGRAPHY61 citations94
US5100237AMar 31, 1992
Apparatus for projecting a mask pattern on a substrate
ASM LITHOGRAPHY110 citations94
US6226075B1May 1, 2001
Supporting device provided with a gas spring with a gas bearing, and lithographic device provided with such supporting devices
ASM LITHOGRAPHY50 citations92
US5481362AJan 2, 1996
Apparatus for projecting a mask pattern on a substrate
ASM LITHOGRAPHY84 citations91