Assignee
ASM LITHOGRAPHY BV
US26 patents
Top patents by PatentIndex Score
US6208407B1Mar 27, 2001
Method and apparatus for repetitively projecting a mask pattern on a substrate, using a time-saving height measurement
ASM LITHOGRAPHY BV1,029 citations99
US6020964AFeb 1, 2000
Interferometer system and lithograph apparatus including an interferometer system
ASM LITHOGRAPHY BV478 citations99
US6262796B1Jul 17, 2001
Positioning device having two object holders
ASM LITHOGRAPHY BV634 citations96
US6384899B1May 7, 2002
Lithographic projection apparatus
ASM LITHOGRAPHY BV103 citations95
US6337484B1Jan 8, 2002
Positioning device and lithographic projection apparatus comprising such a device
ASM LITHOGRAPHY BV91 citations95
US6160622ADec 12, 2000
Alignment device and lithographic apparatus comprising such a device
ASM LITHOGRAPHY BV105 citations95
US5969441AOct 19, 1999
Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device
ASM LITHOGRAPHY BV1,609 citations95
US6297876B1Oct 2, 2001
Lithographic projection apparatus with an alignment system for aligning substrate on mask
ASM LITHOGRAPHY BV255 citations94
US5144363ASep 1, 1992
Apparatus for and method of projecting a mask pattern on a substrate
ASM LITHOGRAPHY BV112 citations94
US6388736B1May 14, 2002
Imaging method using phase boundary masking with modified illumination
ASM LITHOGRAPHY BV39 citations92
US6084673AJul 4, 2000
Lithographic apparatus for step-and-scan imaging of mask pattern with interferometer mirrors on the mask and wafer holders
ASM LITHOGRAPHY BV49 citations92
US6563564B2May 13, 2003
Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured thereby
ASM LITHOGRAPHY BV58 citations90
US6054784AApr 25, 2000
Positioning device having three coil systems mutually enclosing angles of 120° and lithographic device comprising such a positioning device
ASM LITHOGRAPHY BV43 citations90
US6373552B1Apr 16, 2002
Optical correction plate, and its application in a lithographic projection apparatus
ASM LITHOGRAPHY BV24 citations89
US6028660AFeb 22, 2000
Illumination unit for an optical apparatus
ASM LITHOGRAPHY BV37 citations89
US5508528AApr 16, 1996
Illumination unit having a facility for preventing contamination of optical components, and photolithographic apparatus including such an illumination unit
ASM LITHOGRAPHY BV22 citations89
US6122058ASep 19, 2000
Interferometer system with two wavelengths, and lithographic apparatus provided with such a system
ASM LITHOGRAPHY BV55 citations88
US6373072B1Apr 16, 2002
Lithographic projection apparatus
ASM LITHOGRAPHY BV17 citations80
US6232615B1May 15, 2001
Lithographic projection apparatus with improved substrate holder
ASM LITHOGRAPHY BV29 citations80
US6362871B1Mar 26, 2002
Lithographic apparatus
ASM LITHOGRAPHY BV8 citations74
US6296990B1Oct 2, 2001
Gas bearing and lithographic apparatus including such a bearing
ASM LITHOGRAPHY BV13 citations74
US6067146AMay 23, 2000
Photolithographic apparatus
ASM LITHOGRAPHY BV14 citations71
US4746800AMay 24, 1988
Positioning device comprising a z-manipulator and a θ-manipulator
ASM LITHOGRAPHY BV16 citations69
US6348303B1Feb 19, 2002
Lithographic projection apparatus
ASM LITHOGRAPHY BV9 citations66
US6239862B1May 29, 2001
Photolithographic apparatus
ASM LITHOGRAPHY BV4 citations60
US5889580AMar 30, 1999
Scanning-slit exposure device
ASM LITHOGRAPHY BV1 citations51