Assignee
ASML NETHERLANDS BV
NL3,861 patents
Top patents by PatentIndex Score
US7791727B2Sep 7, 2010
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV89 citations99
US7593093B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV67 citations99
US7593092B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV60 citations99
US7528931B2May 5, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV76 citations99
US7394521B2Jul 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV160 citations99
US7388648B2Jun 17, 2008
Lithographic projection apparatus
ASML NETHERLANDS BV136 citations99
US7362446B2Apr 22, 2008
Position measurement unit, measurement system and lithographic apparatus comprising such position measurement unit
ASML NETHERLANDS BV164 citations99
US7289212B2Oct 30, 2007
Lithographic apparatus, device manufacturing method and device manufacturing thereby
ASML NETHERLANDS BV155 citations99
US7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7199858B2Apr 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV409 citations99
US7193232B2Mar 20, 2007
Lithographic apparatus and device manufacturing method with substrate measurement not through liquid
ASML NETHERLANDS BV216 citations99
US7081943B2Jul 25, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV199 citations99
US7075616B2Jul 11, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV366 citations99
US7050146B2May 23, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV165 citations99
US7009682B2Mar 7, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV200 citations99
US6952253B2Oct 4, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1,825 citations99
US10879031B2Dec 29, 2020
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV30 citations98
US10643820B2May 5, 2020
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV29 citations98
US7864292B2Jan 4, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV57 citations98
US7791732B2Sep 7, 2010
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV80 citations98
US7738074B2Jun 15, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV52 citations98
US7628865B2Dec 8, 2009
Methods to clean a surface, a device manufacturing method, a cleaning assembly, cleaning apparatus, and lithographic apparatus
ASML NETHERLANDS BV58 citations98
US7589818B2Sep 15, 2009
Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatus
ASML NETHERLANDS BV66 citations98
US7511799B2Mar 31, 2009
Lithographic projection apparatus and a device manufacturing method
ASML NETHERLANDS BV179 citations98
US7486408B2Feb 3, 2009
Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement
ASML NETHERLANDS BV53 citations98
US7482611B2Jan 27, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV65 citations98
US7483120B2Jan 27, 2009
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
ASML NETHERLANDS BV121 citations98
US7473917B2Jan 6, 2009
Lithographic apparatus and method
ASML NETHERLANDS BV82 citations98
US7462850B2Dec 9, 2008
Radical cleaning arrangement for a lithographic apparatus
ASML NETHERLANDS BV60 citations98
US7408655B2Aug 5, 2008
Lithographic apparatus and method for calibrating the same
ASML NETHERLANDS BV72 citations98
US7372541B2May 13, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV74 citations98
US7352434B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV178 citations98
US7348574B2Mar 25, 2008
Position measurement system and lithographic apparatus
ASML NETHERLANDS BV138 citations98
US7317504B2Jan 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV114 citations98
US7292312B2Nov 6, 2007
Lithographic apparatus and method for calibrating the same
ASML NETHERLANDS BV139 citations98
US7256871B2Aug 14, 2007
Lithographic apparatus and method for calibrating the same
ASML NETHERLANDS BV146 citations98
US7253875B1Aug 7, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV166 citations98
US7245356B2Jul 17, 2007
Lithographic apparatus and method for optimizing illumination using a photolithographic simulation
ASML NETHERLANDS BV72 citations98
US7224436B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV110 citations98
US7161659B2Jan 9, 2007
Dual stage lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV271 citations98
US7119874B2Oct 10, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV143 citations98
US7110081B2Sep 19, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV128 citations98
US7038760B2May 2, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV78 citations98
US7030966B2Apr 18, 2006
Lithographic apparatus and method for optimizing an illumination source using photolithographic simulations
ASML NETHERLANDS BV100 citations98
US6838684B2Jan 4, 2005
Lithographic projection apparatus and particle barrier for use therein
ASML NETHERLANDS BV111 citations98
US6710849B2Mar 23, 2004
Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method
ASML NETHERLANDS BV74 citations98
US6603130B1Aug 5, 2003
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses
ASML NETHERLANDS BV733 citations98
US6449030B1Sep 10, 2002
Balanced positioning system for use lithographic apparatus
ASML NETHERLANDS BV114 citations98
US6449086B1Sep 10, 2002
Multilayer extreme ultraviolet mirrors with enhanced reflectivity
ASML NETHERLANDS BV80 citations98
US7880901B2Feb 1, 2011
Lithographic apparatus and method for calibrating the same
ASML NETHERLANDS BV63 citations97
Showing the top 50 of 3,861 patents by PatentIndex Score.