Assignee
ASML US INC
US19 patents
Top patents by PatentIndex Score
US6462310B1Oct 8, 2002
Hot wall rapid thermal processor
ASML US INC301 citations97
US6660391B1Dec 9, 2003
Low κ dielectric inorganic/organic hybrid films and method of making
ASML US INC67 citations95
US6521048B2Feb 18, 2003
Single body injector and deposition chamber
ASML US INC71 citations94
US6476921B1Nov 5, 2002
In-situ method and apparatus for end point detection in chemical mechanical polishing
ASML US INC63 citations94
US6544345B1Apr 8, 2003
Method and system for in-situ cleaning of semiconductor manufacturing equipment using combination chemistries
ASML US INC67 citations93
US6411426B1Jun 25, 2002
Apparatus, system, and method for active compensation of aberrations in an optical system
ASML US INC58 citations93
US6729353B2May 4, 2004
Modular fluid delivery apparatus
ASML US INC29 citations92
US6610150B1Aug 26, 2003
Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system
ASML US INC56 citations91
US6507390B1Jan 14, 2003
Method and apparatus for a reticle with purged pellicle-to-reticle gap
ASML US INC42 citations90
US6458013B1Oct 1, 2002
Method of chemical mechanical polishing
ASML US INC35 citations90
US6556281B1Apr 29, 2003
Flexible piezoelectric chuck and method of using the same
ASML US INC36 citations89
US6492621B2Dec 10, 2002
Hot wall rapid thermal processor
ASML US INC15 citations89
US6398373B1Jun 4, 2002
Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems
ASML US INC47 citations89
US6533531B1Mar 18, 2003
Device for handling wafers in microelectronic manufacturing
ASML US INC29 citations84
US7306114B2Dec 11, 2007
Non-dripping nozzle apparatus
ASML US INC7 citations71
US6485783B1Nov 26, 2002
Chemical vapor deposition system
ASML US INC5 citations71
US6509577B1Jan 21, 2003
Systems and methods for exposing substrate periphery
ASML US INC8 citations70
US6667239B2Dec 23, 2003
Chemical mechanical polishing of copper-oxide damascene structures
ASML US INC5 citations55
US6576060B1Jun 10, 2003
Protective gas shield apparatus
ASML US INC3 citations49