Assignee
ASML US LLC
US4 patents
Top patents by PatentIndex Score
US10656530B2May 19, 2020
Application of FreeForm MRC to SRAF optimization based on ILT mask optimization
ASML US LLC3 citations69
US11119401B2Sep 14, 2021
Simulating near field image in optical lithography
ASML US LLC0 citations60
US10705420B2Jul 7, 2020
Mask bias approximation
ASML US LLC1 citations59
US10578963B2Mar 3, 2020
Mask pattern generation based on fast marching method
ASML US LLC1 citations59