Assignee
ASYST TECHNOLOGIES
US93 patents
Top patents by PatentIndex Score
US7055875B2Jun 6, 2006
Ultra low contact area end effector
ASYST TECHNOLOGIES561 citations99
US5980183ANov 9, 1999
Integrated intrabay buffer, delivery, and stocker system
ASYST TECHNOLOGIES287 citations99
US5586585ADec 24, 1996
Direct loadlock interface
ASYST TECHNOLOGIES585 citations99
US4724874AFeb 16, 1988
Sealable transportable container having a particle filtering system
ASYST TECHNOLOGIES220 citations99
US7293950B2Nov 13, 2007
Universal modular wafer transport system
ASYST TECHNOLOGIES72 citations98
US6308818B1Oct 30, 2001
Transport system with integrated transport carrier and directors
ASYST TECHNOLOGIES126 citations98
US6220808B1Apr 24, 2001
Ergonomic, variable size, bottom opening system compatible with a vertical interface
ASYST TECHNOLOGIES99 citations98
US6216873B1Apr 17, 2001
SMIF container including a reticle support structure
ASYST TECHNOLOGIES182 citations98
US6188323B1Feb 13, 2001
Wafer mapping system
ASYST TECHNOLOGIES130 citations98
US5611452AMar 18, 1997
Sealable transportable container having improved liner
ASYST TECHNOLOGIES228 citations98
US4995430AFeb 26, 1991
Sealable transportable container having improved latch mechanism
ASYST TECHNOLOGIES226 citations98
US4974166ANov 27, 1990
Processing systems with intelligent article tracking
ASYST TECHNOLOGIES169 citations98
US7290813B2Nov 6, 2007
Active edge grip rest pad
ASYST TECHNOLOGIES543 citations97
US6579052B1Jun 17, 2003
SMIF pod storage, delivery and retrieval system
ASYST TECHNOLOGIES242 citations97
US6468021B1Oct 22, 2002
Integrated intra-bay transfer, storage, and delivery system
ASYST TECHNOLOGIES166 citations97
US7410340B2Aug 12, 2008
Direct tool loading
ASYST TECHNOLOGIES47 citations96
US6494308B2Dec 17, 2002
Integrated roller transport pod and asynchronous conveyor
ASYST TECHNOLOGIES46 citations96
US6435330B1Aug 20, 2002
In/out load port transfer mechanism
ASYST TECHNOLOGIES60 citations96
US6319297B1Nov 20, 2001
Modular SMIF pod breather, adsorbent, and purge cartridges
ASYST TECHNOLOGIES67 citations96
US6261044B1Jul 17, 2001
Pod to port door retention and evacuation system
ASYST TECHNOLOGIES58 citations96
US6223886B1May 1, 2001
Integrated roller transport pod and asynchronous conveyor
ASYST TECHNOLOGIES50 citations96
US6056026AMay 2, 2000
Passively activated valve for carrier purging
ASYST TECHNOLOGIES67 citations96
US5988233ANov 23, 1999
Evacuation-driven SMIF pod purge system
ASYST TECHNOLOGIES171 citations96
US5570990ANov 5, 1996
Human guided mobile loader stocker
ASYST TECHNOLOGIES207 citations96
US6591162B1Jul 8, 2003
Smart load port with integrated carrier monitoring and fab-wide carrier management system
ASYST TECHNOLOGIES57 citations95
US6164664ADec 26, 2000
Kinematic coupling compatible passive interface seal
ASYST TECHNOLOGIES64 citations95
US6082949AJul 4, 2000
Load port opener
ASYST TECHNOLOGIES76 citations95
US5846338ADec 8, 1998
Method for dry cleaning clean room containers
ASYST TECHNOLOGIES64 citations95
US5810062ASep 22, 1998
Two stage valve for charging and/or vacuum relief of pods
ASYST TECHNOLOGIES108 citations95
US5740845AApr 21, 1998
Sealable, transportable container having a breather assembly
ASYST TECHNOLOGIES84 citations95
US5469963ANov 28, 1995
Sealable transportable container having improved liner
ASYST TECHNOLOGIES56 citations95
US5169272ADec 8, 1992
Method and apparatus for transferring articles between two controlled environments
ASYST TECHNOLOGIES97 citations95
US5166884ANov 24, 1992
Intelligent system for processing and storing articles
ASYST TECHNOLOGIES112 citations95
US5097421AMar 17, 1992
Intelligent waxer carrier
ASYST TECHNOLOGIES81 citations95
US6634851B1Oct 21, 2003
Workpiece handling robot
ASYST TECHNOLOGIES70 citations94
US6298280B1Oct 2, 2001
Method for in-cassette wafer center determination
ASYST TECHNOLOGIES110 citations94
US6138721AOct 31, 2000
Tilt and go load port interface alignment system
ASYST TECHNOLOGIES88 citations94
US5931631AAug 3, 1999
Method and apparatus for vertical transfer of a semiconductor wafer cassette
ASYST TECHNOLOGIES45 citations94
US5788458AAug 4, 1998
Method and apparatus for vertical transfer of a semiconductor wafer cassette
ASYST TECHNOLOGIES46 citations94
US5547328AAug 20, 1996
Method and apparatus for transferring articles between two controlled environments
ASYST TECHNOLOGIES46 citations94
US4815912AMar 28, 1989
Box door actuated retainer
ASYST TECHNOLOGIES117 citations94
US4739882AApr 26, 1988
Container having disposable liners
ASYST TECHNOLOGIES125 citations94
US4676709AJun 30, 1987
Long arm manipulator for standard mechanical interface apparatus
ASYST TECHNOLOGIES71 citations94
US7472788B2Jan 6, 2009
Belt conveyor for use with semiconductor containers
ASYST TECHNOLOGIES18 citations93
US6533101B2Mar 18, 2003
Integrated transport carrier and conveyor system
ASYST TECHNOLOGIES44 citations93
US6481558B1Nov 19, 2002
Integrated load port-conveyor transfer system
ASYST TECHNOLOGIES47 citations93
US5895191AApr 20, 1999
Sealable, transportable container adapted for horizontal loading and unloading
ASYST TECHNOLOGIES51 citations93
US4674936AJun 23, 1987
Short arm manipulator for standard mechanical interface apparatus
ASYST TECHNOLOGIES43 citations93
US4674939AJun 23, 1987
Sealed standard interface apparatus
ASYST TECHNOLOGIES88 citations93
US7066707B1Jun 27, 2006
Wafer engine
ASYST TECHNOLOGIES28 citations92
Showing the top 50 of 93 patents by PatentIndex Score.