Assignee
ASYST TECHNOLOGIES
US·93 granted patents·3 pending applications·7,698 citations·filing 1984–2009
Top patents by PatentIndex Score
96 records- 0199US7055875B2Ultra low contact area end effectorASYST TECHNOLOGIES·Filed 2004·Granted Jun 6, 2006·561 cites·19 claims
- 0298US5586585ADirect loadlock interfaceASYST TECHNOLOGIES·Filed 1995·Granted Dec 24, 1996·585 cites·41 claims
- 0397US7410340B2Direct tool loadingASYST TECHNOLOGIES·Filed 2005·Granted Aug 12, 2008·47 cites·19 claims
- 0497US7290813B2Active edge grip rest padASYST TECHNOLOGIES·Filed 2004·Granted Nov 6, 2007·543 cites·17 claims
- 0597US5980183AIntegrated intrabay buffer, delivery, and stocker systemASYST TECHNOLOGIES·Filed 1997·Granted Nov 9, 1999·287 cites·33 claims
- 0697US4724874ASealable transportable container having a particle filtering systemASYST TECHNOLOGIES·Filed 1986·Granted Feb 16, 1988·220 cites·10 claims
- 0796US4995430ASealable transportable container having improved latch mechanismASYST TECHNOLOGIES·Filed 1989·Granted Feb 26, 1991·226 cites·12 claims
- 0895US7293950B2Universal modular wafer transport systemASYST TECHNOLOGIES·Filed 2002·Granted Nov 13, 2007·72 cites·16 claims
- 0995US6468021B1Integrated intra-bay transfer, storage, and delivery systemASYST TECHNOLOGIES·Filed 1999·Granted Oct 22, 2002·166 cites·19 claims
- 1095US5611452ASealable transportable container having improved linerASYST TECHNOLOGIES·Filed 1994·Granted Mar 18, 1997·228 cites·32 claims
- 1195US4974166AProcessing systems with intelligent article trackingASYST TECHNOLOGIES·Filed 1989·Granted Nov 27, 1990·169 cites·11 claims
- 1294US6579052B1SMIF pod storage, delivery and retrieval systemASYST TECHNOLOGIES·Filed 1997·Granted Jun 17, 2003·242 cites·14 claims
- 1394US6216873B1SMIF container including a reticle support structureASYST TECHNOLOGIES·Filed 1999·Granted Apr 17, 2001·182 cites·6 claims
- 1494US4815912ABox door actuated retainerASYST TECHNOLOGIES·Filed 1984·Granted Mar 28, 1989·117 cites·19 claims
- 1592US7472788B2Belt conveyor for use with semiconductor containersASYST TECHNOLOGIES·Filed 2006·Granted Jan 6, 2009·18 cites·32 claims
- 1692US6308818B1Transport system with integrated transport carrier and directorsASYST TECHNOLOGIES·Filed 1999·Granted Oct 30, 2001·126 cites·12 claims
- 1792US6188323B1Wafer mapping systemASYST TECHNOLOGIES·Filed 1998·Granted Feb 13, 2001·130 cites·23 claims
- 1892US5988233AEvacuation-driven SMIF pod purge systemASYST TECHNOLOGIES·Filed 1998·Granted Nov 23, 1999·171 cites·20 claims
- 1992US5570990AHuman guided mobile loader stockerASYST TECHNOLOGIES·Filed 1993·Granted Nov 5, 1996·207 cites·21 claims
- 2092US4739882AContainer having disposable linersASYST TECHNOLOGIES·Filed 1986·Granted Apr 26, 1988·125 cites·29 claims
- 2191US6494308B2Integrated roller transport pod and asynchronous conveyorASYST TECHNOLOGIES·Filed 2001·Granted Dec 17, 2002·46 cites·2 claims
- 2290US6634851B1Workpiece handling robotASYST TECHNOLOGIES·Filed 2000·Granted Oct 21, 2003·70 cites·25 claims
- 2390US6591162B1Smart load port with integrated carrier monitoring and fab-wide carrier management systemASYST TECHNOLOGIES·Filed 2000·Granted Jul 8, 2003·57 cites·8 claims
- 2489US7293811B2Ultra low contact area end effectorASYST TECHNOLOGIES·Filed 2006·Granted Nov 13, 2007·12 cites·8 claims
- 2589US6591160B2Self teaching robotASYST TECHNOLOGIES·Filed 2000·Granted Jul 8, 2003·54 cites·12 claims
- 2689US6533101B2Integrated transport carrier and conveyor systemASYST TECHNOLOGIES·Filed 2002·Granted Mar 18, 2003·44 cites·9 claims
- 2789US6419438B1FIMS interface without alignment pinsASYST TECHNOLOGIES·Filed 2000·Granted Jul 16, 2002·51 cites·24 claims
- 2889US6220808B1Ergonomic, variable size, bottom opening system compatible with a vertical interfaceASYST TECHNOLOGIES·Filed 1998·Granted Apr 24, 2001·99 cites·19 claims
- 2989US6164664AKinematic coupling compatible passive interface sealASYST TECHNOLOGIES·Filed 1998·Granted Dec 26, 2000·64 cites·18 claims
- 3089US4674939ASealed standard interface apparatusASYST TECHNOLOGIES·Filed 1984·Granted Jun 23, 1987·88 cites·11 claims
- 3188US7445415B2Direct tool loadingASYST TECHNOLOGIES·Filed 2005·Granted Nov 4, 2008·9 cites·28 claims
- 3288US6853876B2Distributed control system architecture and method for a material transport systemASYST TECHNOLOGIES·Filed 2001·Granted Feb 8, 2005·80 cites·8 claims
- 3388US6530736B2SMIF load port interface including smart port doorASYST TECHNOLOGIES·Filed 2001·Granted Mar 11, 2003·44 cites·7 claims
- 3488US5169272AMethod and apparatus for transferring articles between two controlled environmentsASYST TECHNOLOGIES·Filed 1990·Granted Dec 8, 1992·97 cites·11 claims
- 3587US6810294B2Method and apparatus for automating a microelectronic manufacturing processASYST TECHNOLOGIES·Filed 2002·Granted Oct 26, 2004·28 cites·15 claims
- 3687US6729462B2Edge grip aligner with buffering capabilitiesASYST TECHNOLOGIES·Filed 2003·Granted May 4, 2004·37 cites·17 claims
- 3787US6326755B1System for parallel processing of workpiecesASYST TECHNOLOGIES·Filed 2000·Granted Dec 4, 2001·46 cites·32 claims
- 3887US5810062ATwo stage valve for charging and/or vacuum relief of podsASYST TECHNOLOGIES·Filed 1996·Granted Sep 22, 1998·108 cites·8 claims
- 3987US5166884AIntelligent system for processing and storing articlesASYST TECHNOLOGIES·Filed 1991·Granted Nov 24, 1992·112 cites·3 claims
- 4086US6513654B2SMIF container including an electrostatic dissipative reticle support structureASYST TECHNOLOGIES·Filed 2001·Granted Feb 4, 2003·37 cites·15 claims
- 4186US6435330B1In/out load port transfer mechanismASYST TECHNOLOGIES·Filed 1999·Granted Aug 20, 2002·60 cites·16 claims
- 4286US6319297B1Modular SMIF pod breather, adsorbent, and purge cartridgesASYST TECHNOLOGIES·Filed 1998·Granted Nov 20, 2001·67 cites·17 claims
- 4386US6298280B1Method for in-cassette wafer center determinationASYST TECHNOLOGIES·Filed 1998·Granted Oct 2, 2001·110 cites·22 claims
- 4486US5740845ASealable, transportable container having a breather assemblyASYST TECHNOLOGIES·Filed 1995·Granted Apr 21, 1998·84 cites·34 claims
- 4586US5097421AIntelligent waxer carrierASYST TECHNOLOGIES·Filed 1987·Granted Mar 17, 1992·81 cites·18 claims
- 4686US4676709ALong arm manipulator for standard mechanical interface apparatusASYST TECHNOLOGIES·Filed 1985·Granted Jun 30, 1987·71 cites·16 claims
- 4785US7066707B1Wafer engineASYST TECHNOLOGIES·Filed 2002·Granted Jun 27, 2006·28 cites·13 claims
- 4885US6677690B2System for safeguarding integrated intrabay pod delivery and storage systemASYST TECHNOLOGIES·Filed 2001·Granted Jan 13, 2004·40 cites·4 claims
- 4984US7300082B2Active edge gripping and effectorASYST TECHNOLOGIES·Filed 2003·Granted Nov 27, 2007·33 cites·17 claims
- 5083US7419346B2Integrated system for tool front-end workpiece handlingASYST TECHNOLOGIES·Filed 2002·Granted Sep 2, 2008·49 cites·13 claims
Showing the top 50 of 96 patent records by PatentIndex Score.
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