Assignee
ATTOFEMTO INC
US12 patents
Top patents by PatentIndex Score
US7728958B2Jun 1, 2010
Condition assessment method for a structure including a semiconductor material
ATTOFEMTO INC40 citations95
US7420687B2Sep 2, 2008
Condition assessment system for a structure including a semiconductor material
ATTOFEMTO INC32 citations95
US7323889B2Jan 29, 2008
Voltage testing and measurement
ATTOFEMTO INC24 citations95
US8040521B2Oct 18, 2011
Holographic condition assessment system for a structure including a semiconductor material
ATTOFEMTO INC20 citations92
US7773230B2Aug 10, 2010
Interferometric condition assessment system for a microelectronic structure including a semiconductor or free-metal material
ATTOFEMTO INC14 citations91
US7400411B2Jul 15, 2008
Method for optically testing semiconductor devices
ATTOFEMTO INC20 citations91
US7206078B2Apr 17, 2007
Non-destructive testing system using a laser beam
ATTOFEMTO INC24 citations90
US9366719B2Jun 14, 2016
Optical to optical methods enhancing the sensitivity and resolution of ultraviolet, electron beam and ion beam devices
ATTOFEMTO INC4 citations83
US7733499B2Jun 8, 2010
Method for optically testing semiconductor devices
ATTOFEMTO INC10 citations83
US9952161B2Apr 24, 2018
Methods for obtaining and analyzing digital interferometric data for computer testing and developing semiconductor and anisotropic devices and materials
ATTOFEMTO INC2 citations72
US9250064B2Feb 2, 2016
Multiple beam transmission interferometric testing methods for the development and evaluation of subwavelength sized features within semiconductor and anisotropic devices
ATTOFEMTO INC4 citations72
US8879071B2Nov 4, 2014
Multiple optical wavelength interferometric testing methods for the development and evaluation of subwavelength sized features within semiconductor devices and materials, wafers, and monitoring all phases of development and manufacture
ATTOFEMTO INC4 citations72