Assignee
AVIZA EUROP LTD
GB·4 granted patents·19 citations·filing 2000–2002
Top patents by PatentIndex Score
4 records- 0159US7378001B2Magnetron sputteringAVIZA EUROP LTD·Filed 2001·Granted May 27, 2008·7 cites·27 claims
- 0255US7279201B2Methods and apparatus for forming precursorsAVIZA EUROP LTD·Filed 2002·Granted Oct 9, 2007·2 cites·15 claims
- 0352US7199474B2Damascene structure with integral etch stop layerAVIZA EUROP LTD·Filed 2002·Granted Apr 3, 2007·7 cites·4 claims
- 0444US7309662B1Method and apparatus for forming a film on a substrateAVIZA EUROP LTD·Filed 2000·Granted Dec 18, 2007·3 cites·28 claims
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