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AXCELIS TECHNOLOGIES
US3 patents
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US6630406B2Oct 7, 2003
Plasma ashing process
AXCELIS TECHNOLOGIES50 citations91
US6610968B1Aug 26, 2003
System and method for controlling movement of a workpiece in a thermal processing system
AXCELIS TECHNOLOGIES47 citations88
US6753506B2Jun 22, 2004
System and method of fast ambient switching for rapid thermal processing
AXCELIS TECHNOLOGIES33 citations87